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US 2014/0227644 A1Published application
Functional film, liquid immersion member, method of manufacturing liquid immersion member, exposure apparatus, and device manufacturing method
AssigneeNikon Corporation
InventorsTsukasa KISHIUME, Yusuke TAKI
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Abstract
A functional film which is applied to a surface of a base material includes a film of Ti-doped tetrahedral amorphous carbon (ta-C:Ti film).
Claims12
A functional film which is applied to a surface of a base material used in a state of being immersed in liquid, the functional film comprising a film of Ti-doped tetrahedral amorphous carbon (ta-C:Ti film).
A functional film which is applied to a surface of a base material, the functional film comprising a film of Ti-doped tetrahedral amorphous carbon (ta-C:Ti film),
- wherein in a composition of the film, α, which is defined by the following Expression (3) and is an atomic ratio of Ti to C (Ti/C atomic ratio), is equal to or greater than 0.03 and equal to or less than 0.09.
- [
- Expression
-
-
- 3
- ]
-
- α
- =
-
- (
- Ti
-
- /
-
- C
-
-
- atomic
-
-
- ratio
- )
- =
-
- (
- number
-
-
- of
-
-
- Ti
-
-
- atoms
- )
- /
-
- {
- (
- number
-
-
- of
-
-
- sp
- 3
-
- -
-
- C
-
-
- atoms
- )
- +
- (
- number
-
-
- of
-
-
- sp
- 2
-
- -
-
- C
-
-
- atoms
- )
- }
- (
- 3
- )
- here, (number of Ti atoms):
- number of Ti atoms occupying the film
- (number of sp3-C atoms):
- number of carbon atoms having an sp3 hybrid orbital occupying the film
- (number of sp2-C atoms):
- number of carbon atoms having an sp2 hybrid orbital occupying the film
83 more elements
Dependencies are inferred from the claim text.