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OwnerYoungha Jun, Jaimoo Yoo +2inventors
InventorsYoungha Jun, Jaimoo Yoo, Kiho Yeo, Shin Eui Chul
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The present invention proposed manufacturing method of coating layers with good conductivity and corrosion resistance at high productivity comprising etching the oxide layer on the stainless steel substrate by plasma etching to activate the surface and prevent from decreasing it's conductivity, coating metal nitrides like CrN or TiN in nano size thickness on the etched surface and coating carbon layer at nano size thickness on top of it. According to the present invention, it is possible to produce manufacture fuel cell bipolar plate, electrode material and stainless steel with reinforced conductivity and corrosion resistance in mass.
Manufacturing method of nano carbon coating layer having corrosion resistance and conductivity comprise three steps of (1) etching the oxide layer of stainless steel substrate, (2) depositing metal nitride buffer layer in nano size thickness on the etched surface and (3) depositing conductive carbon layer on the above buffer layer in nano size thickness.
Stainless steel with conductivity and corrosion resistance reinforced produced by etching its oxide layer, depositing metal nitride buffer layer on the etched surface and depositing conductive carbon layer on top of it in nano size thickness.
Manufacturing system for nano carbon coating layer with conductivity and corrosion resistance which comprises #1 chamber for etching oxide layer of stainless steel by plasma, #2 chamber equipped with metal arc for coating metal nitride layer on the etched surface in #1 chamber and #3 chamber with ion gun for coating conductive carbon layer in nano size on the stainless steel surface coated with metal nitride layer in #2 chamber, the three chambers arranged in-line so that the plasma etching process, the metal nitride coating process and conductive carbon layer coating process would proceed consecutively in-situ.
Dependencies are inferred from the claim text.