Inorganic materials, methods and apparatus for making same, and uses thereof
AssigneeNitride Solutions Inc.
InventorsDaniel Brors, Richard Ernest De-Maray, David Slutz
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Abstract
PVD and HPHT methods and apparatus for producing materials, for example nitrides, are disclosed.
Claims54
An ion beam generator comprising:
- a) a first chamber housing one or more vapour generators capable of forming a vapour from one or more condensed phase sources of material;
- b) a second chamber adjacent the first chamber housing one or more plasma generators comprising
- one or more cathodes having one or more open-ended channels extending therethrough, the channels comprising one or more channel walls and having a length extending from one end of the channel to another end of the channel to define one or more spaces
- and capable of forming plasma within said one or more spaces;
- c) one or more apertures between the first and second chambers arranged to permit vapour generated in the first chamber to enter the second chamber
- the one or more vapour generators and one or more plasma generators being arranged whereby in operation, vapour generated by the one or more vapour generators may traverse the one or more spaces through plasma formed by the one or more plasma generators.
An Apparatus for manufacturing a material by vapour deposition, the apparatus comprising:
- a) at least one ion beam generator;
- b) at least one gas supply operable to supply gas for conversion into plasma within the at least one ion beam generator
- c) at least one substrate mount to receive at least one substrate, and positioned to permit in use at least one substrate mounted to the at least one substrate mount to be bombarded by ions from the at least one ion beam generator.
A crucible comprising:
- a body formed from a material selected from the group:
- a metal, and carbon;
- and
- an adherent coating comprising or consisting of AlN in contact with at least an inner surface of the body.
(canceled)
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The crucible of claim 20, in which the adherent coating comprising AlN is applied by a chemical vapour deposition process, physical vapour deposition process, or a process as claimed in claim 31.
(canceled)
A method of manufacturing a composition, the method comprising:
- providing a crucible comprising a body formed from a metal or a carbon and an adherent coating comprising AlN in contact with at least an inner surface of the body;
- forming an ion beam from at least one ion beam generator;
- and
- bombarding at least one substrate disposed within the crucible with ions from the ion beam to form a deposit on the substrate.
(canceled)
52-78. (canceled)
A laminate of a substrate and a deposited layer, prepared by a process comprising the steps of:
- forming an ion beam from at least one ion beam generator;
- and
- bombarding the substrate disposed within the crucible with ions from the ion beam to form a deposit on the substrate.
Dependencies are inferred from the claim text.