Buffer material for packing wafer carrier
AssigneeSumco Corporation
InventorTomohiro HORIO
Life of this patent
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AssigneeSumco Corporation
InventorTomohiro HORIO
Estimating the term…
At the time of packing a wafer carrier into a container, an upper buffer body and a lower buffer body are arranged above and below the wafer carrier. The wafer carrier has: a box-like carrier main body having a frame-like step portion formed on an upper inner peripheral surface of an access opening; and a lid body that closes the access opening in an openable manner when it is accommodated in the frame-like step portion through a gasket. Further, the upper buffer body has: an upper concave portion that accommodates an upper portion of the wafer carrier therein; and a pressing rib that is brought into contact with an upper end surface of a carrier main body and pressed against the upper end surface of the carrier main body without contacting with the lid body. Furthermore, the lower buffer body has: a lower concave portion and a support portion.
A buffer material for packing a wafer carrier, the buffer material comprising an upper buffer body and a lower buffer body that are arranged above and below a wafer carrier at the time of packing the wafer carrier in a container, the wafer carrier comprising:
Dependencies are inferred from the claim text.