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US 2014/0227455 A1Published application
Method for processing a flexible substrate
AssigneeApplied Materials, Inc.
InventorsGerd Hoffmann, Günter Klemm, Hans-Georg Lotz, Alexander Wolff
Life of this patent
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Abstract
A method of processing a flexible substrate includes providing a flexible substrate having a polymerized surface; emitting an electron beam; exposing the polymerized surface to the electron beam; modifying the polymerized surface by the exposure to the electron beam; and depositing a barrier layer on the modified surface.
Claims20
A method of processing a flexible substrate, comprising:
- providing a flexible substrate having a polymerized surface;
- emitting an electron beam;
- exposing the polymerized surface to the electron beam;
- modifying the polymerized surface by the exposure to the electron beam;
- and
- depositing a barrier layer on the modified surface.
3 more elements
The method according to claim 13, wherein the processing gas is selected from the group consisting of:
- argon, more particularly nitrogen or oxygen, a mixture of nitrogen and oxygen, and combinations of the former.
Dependencies are inferred from the claim text.