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US 2014/0227447 A1Published application
Block coploymer formulation and methods relating thereto
AssigneeRohm and Haas Electronic Materials LLC
InventorsPhillip Hustad, Peter Trefonas, Xinyu Gu, Shih-Wei Chang, Valeriy Ginzburg, Erin Vogel, Daniel Murray
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Abstract
A block copolymer formulation is provided including a block copolymer blend including a first poly(acrylate)-b-poly(silyl acrylate) block copolymer; and, a second poly(acrylate)-b-poly(silyl acrylate) block copolymer. Also provided are substrates treated with the block copolymer formulation.
Claims12
A block copolymer formulation, comprising:
- a block copolymer blend, comprising:
- a first poly(acylate)-b-poly(silyl acrylate) block copolymer (“DB1”) having a DB1 poly(acrylate) block, a DB1 poly(silyl acrylate) block and a DB1 number average molecular weight, MN-DB1, of 10 to 1,000 kg/mol;
- a DB1 polydispersity, PDDB1, of 1 to 3;
- and,
- a second poly(acrylate)-b-poly(silyl acrylate) block copolymer (“DB2”) having a DB2 poly(acrylate) block, a DB2 poly(silyl acrylate) block and a DB2 number average molecular weight, MN-DB2, of 1 to 1,000 kg/mol;
- a DB2 polydispersity, PDDB2, of 1 to 3;
- and,
- ≧2 wt % antioxidant (based on the weight of the block copolymer blend).
5 more elements
A block copolymer formulation, comprising:
- a block copolymer blend, comprising:
- a first poly(acylate)-b-poly(silyl acrylate) block copolymer (“DB1”) having a DB1 poly(acrylate) block, a DB1 poly(silyl acrylate) block and a DB1 number average molecular weight, MN-DB1, of 10 to 1,000 kg/mol;
- a DB1 polydispersity, PDDB1, of 1 to 3;
- and,
- a second poly(acrylate)-b-poly(silyl acrylate) block copolymer (“DB2”) having a DB2 poly(acrylate) block, a DB2 poly(silyl acrylate) block and a DB2 number average molecular weight, MN-DB2, of 1 to 1,000 kg/mol;
- a DB2 polydispersity, PDDB2, of 1 to 3;
- wherein the block copolymer formulation contains ≦75 wt % of a poly(methyl methacrylate)-block-poly((trimethylsilyl)methyl methacrylate) diblock copolymer.
4 more elements
Dependencies are inferred from the claim text.