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US 2014/0227445 A1Published application
Directed self assembly copolymer composition and related methods
AssigneeRohm and Haas Electronic Materials LLC
InventorsPeter Trefonas, Phillip Hustad, Xinyu Gu, Erin Vogel, Valeriy Ginzburg, Shih-Wei Chang, Daniel Murray
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Abstract
A copolymer composition is provided including a block copolymer having a poly(styrene) block and a poly(silyl acrylate) block; wherein the block copolymer exhibits a number average molecular weight, MN, of 1 to 1,000 kg/mol; and, wherein the block copolymer exhibits a polydispersity, PD, of 1 to 2. Also provided are substrates treated with the copolymer composition.
Claims10
A copolymer composition, comprising:
- a block copolymer having a poly(styrene) block and a poly(silyl acrylate) block;
- wherein the block copolymer exhibits a number average molecular weight, MN, of 1 to 1,000 kg/mol and wherein the block copolymer exhibits a polydispersity, PD, of 1 to 2.
Dependencies are inferred from the claim text.