Gas system for reactive deposition process
AssigneeApplied Materials, Inc.
InventorsGerd Hoffmann, Alexander Wolff
Life of this patent
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Abstract
A gas lance unit configured for a reactive deposition process with a plurality of spaced apart crucibles, wherein spaces are provided between the crucibles, is described. The gas lance unit includes a gas guiding tube having one or more outlets for providing a gas for the reactive deposition process, and a condensate guiding element for guiding a condensate, particularly an aluminum condensate, to one or more positions above the spaces.
Claims20
A gas lance unit configured for a reactive deposition process with a plurality of spaced apart crucibles, wherein spaces are provided between the crucibles, the gas lance unit comprising:
- a gas guiding tube having one or more outlets for providing a gas for the reactive deposition process;
- and
- a condensate guiding element for guiding a condensate, to one or more positions above the spaces.
An evaporation apparatus for a reactive deposition process, comprising:
- a plurality of supports for a plurality of spaced apart crucibles, wherein spaces are provided between the crucibles;
- a deposition surface for depositing a material onto a substrate provided on the deposition surface;
- and
- a gas lance unit, wherein the gas lance unit is provided below the deposition surface and has a length extending in a first direction, and wherein the gas lance unit comprises:
- a gas guiding tube having one or more outlets for providing a gas for the reactive deposition process;
- and
- a condensate guiding element for guiding a condensate.
A method of operating an evaporation apparatus, comprising:
- evaporating a material in a plurality of spaced apart crucibles towards a deposition surface, wherein spaces are provided between the crucibles;
- guiding a gas into the vapor between the crucibles and the deposition region with a gas guiding tube;
- and
- guiding condensate of the vapor to positions above the spaces.
Dependencies are inferred from the claim text.