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US 2014/0227169 A1Published application
Method for manufacturing zinc oxide thin film, and device
AssigneeNikon Corporation
InventorsYasutaka Nishi, Makoto Nakazumi, Yusuke Taki
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Abstract
A method of manufacturing a zinc oxide thin film includes: preparing a basic solution containing tetrahydroxozincate (II) ions and having a pH of 10 or more; diluting the basic solution such that the pH becomes 8.5 or less; applying the basic solution to a substrate; and heating the basic solution.
Claims7
A method of manufacturing a zinc oxide thin film, the method comprising:
- preparing a basic solution containing tetrahydroxozincate (II) ions and having a pH of 10 or more;
- diluting the basic solution such that the pH becomes 8.5 or less;
- applying the basic solution to a substrate;
- and
- heating the basic solution.
2 more elements
Dependencies are inferred from the claim text.