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US 2014/0227147 A1Published application
Microfluidic Device and Method
AssigneeInfineon Technologies AG
InventorsStefan Beyer, Dietrich Bonart
Life of this patent
Estimating the term…
Abstract
A microfluidic device includes a semiconductor chip having a main chip surface. The microfluidic device further includes an encapsulation body embedding the semiconductor chip, the encapsulation body having a main body surface. A microfluidic component extends over the main chip surface and over the main encapsulation body surface and traverses an outline of the main chip surface.
Claims25
A microfluidic device, comprising:
- a first semiconductor chip having a first main chip surface;
- an encapsulation body embedding the first semiconductor chip, the encapsulation body having a first main encapsulation body surface;
- and
- a first microfluidic component extending over the first main chip surface and over the first main encapsulation body surface and traversing an outline of the first main chip surface.
1 more element
A microfluidic device, comprising:
- a first semiconductor chip comprising a first integrated device configured to interact with a microfluidic flow;
- a second semiconductor chip comprising a second integrated device configured to interact with a microfluidic flow;
- and
- an encapsulation body embedding the first semiconductor chip and the second semiconductor chip.
1 more element
A method of manufacturing a microfluidic device, the method comprising:
- placing a plurality of semiconductor chips on a carrier, each semiconductor chip having an active region that faces the carrier;
- covering the semiconductor chips with an encapsulating material that forms an encapsulant;
- removing the carrier from the encapsulant;
- forming a microfluidic component on each semiconductor chip, wherein the active region of each semiconductor chip is coupled to the microfluidic component;
- and
- singulating the semiconductor chips to form multiple encapsulation bodies, each embedding at least one semiconductor chip.
3 more elements
Dependencies are inferred from the claim text.