Non-contacting conveyance equipment

Non-contacting conveyance equipment for conveying a plate-like member in a non-contacting manner, comprising:

• a plate-like base body;
• and
• a plurality of swirl flow-forming bodies provided at the base body, wherein each of the plurality of swirl flow-forming bodies includes:
• a column-shaped main body;
• a cylindrical chamber formed inside the main body, that has an opening at one end;
• a flat end face formed at a surface of the main body, on which the cylindrical chamber is opened;
• a jetting port provided at an inner circumferential surface of the cylindrical chamber;
• a fluid introduction port provided at an outer circumferential surface of the main body;
• and
• a fluid passage that connects the fluid introduction port to the jetting port, wherein the fluid passage is arranged so that a direction in which a fluid flows out of the cylindrical chamber along the end face is substantially parallel to a line that extends from a center of gravity of the plate-like member being conveyed, toward an outer circumference of the plate-like member.