Manufacturing method of semiconductor device
AssigneeRenesas Electronics Corporation
InventorEiji WADA
Life of this patent
Estimating the term…
Abstract
An optical component is fixed precisely on a sensor chip. After a sensor chip including a front surface having a sensor plane with a plurality of light receiving elements is mounted face-up over a wiring substrate, an adhesive is disposed on the front surface of the sensor chip at a plurality of positions, and a plurality of spacers having adherence is formed by curing this adhesive. Then, an adhesive paste is disposed on the front surface of the sensor chip. Then, an optical component held by a bonding tool is disposed on the front surface via the spacer and the adhesive. After that, the bonding tool is separated from the optical component and the optical component is fixed by curing the adhesive in a state in which a load is not applied to the optical component.
Claims22
1-21. (canceled)
A manufacturing method of a semiconductor device comprising the steps of:
- (a) providing a wiring substrate having an upper surface and a lower surface opposite to the upper surface;
- (b) mounting a sensor chip having a first major surface, a sensor region formed on the first major surface, a plurality of pixels formed in the sensor region, and a first rear surface opposite to the first major surface, on the upper surface of the wiring substrate so that the first rear surface faces the upper surface of the wiring substrate;
- (c) disposing a first adhesive at a plurality of positions on the first major surface of the sensor chip;
- (d) after the step (c), forming a plurality of first spacers on the first major surface of the sensor chip by curing the first adhesive;
- (e) after the step (d), disposing a second adhesive in a paste state on the first major surface of the sensor chip;
- (f) after the step (e), disposing a first optical component having a light blocking layer in which a plurality of optical regions is formed, over the first major surface of the sensor chip via the first spacers and the second adhesive;
- and
- (g) after the step (f), curing the second adhesive,
- wherein the step (e) forms the second adhesive to be of greater height than each of the first spacers,
- the step (f) disposes the first optical component over the first major surface of the sensor chip while applying a load to the first optical component, and
- the step (g) cures the second adhesive in a state of not applying a load to the first optical component.
Dependencies are inferred from the claim text.