Method for forming vertical type sensor
AssigneeNational Chiao Tung University
InventorsHsiao-Wen Zan, Hsin-Fei Meng, Ming-Zhi Dai, Yu-Chiang Chao
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Abstract
The present invention provides a vertical type sensor, including a substrate; a first electrode formed on the substrate; a sensing layer formed on the first electrode layer and reactive to a target substance, wherein the first electrode layer is interposed between the substrate and the sensing layer; and a second electrode layer formed on the sensing layer and having a plurality of openings, wherein the sensing layer is interposed between the first electrode layer and the second electrode layer, and the target substance contacts the sensing layer via the plurality of openings. The vertical type sensor of the present invention provides instant, sensitive and rapid detection.
Claims7
1-25. (canceled)
A method for forming a vertical type sensor, comprising the steps of:
- providing a substrate having a surface formed with a first electrode layer thereon;
- forming a sensing layer on the first electrode layer, wherein the sensing layer is reactive to a target substance;
- applying a plurality of first nanoparticles on the sensing layer in a manner that a portion of a top surface of the sensing layer is exposed from the plurality of first nanoparticles;
- forming a second electrode layer on the portion of the top surface of the sensing layer and exposed from the sensing layer, wherein the sensing layer is interposed between the first electrode layer and the second electrode layer;
- removing the plurality of first nanoparticles and forming a plurality of openings in the second electrode layer for exposing the sensing layer, wherein the target substance contacts the sensing layer via the plurality of openings;
- and
- forming an inert semiconductor layer on the first electrode layer before forming the sensing layer.
Dependencies are inferred from the claim text.