Method of manufacturing a magnetoresistive device
AssigneeEverspin Technologies, Inc.
InventorsSarin A. Deshpande, Sanjeev Aggarwal
Life of this patent
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Abstract
A method of manufacturing a magnetoresistive-based device includes etching a hard mask layer, the etching having a selectivity greater than 2:1 and preferably less than 5:1 of the hard mask layer to a photo resist thereover. Optionally, the photo resist is trimmed prior to the etch, and oxygen may be applied during or just subsequent to the trim of the photo resist to increase side shrinkage. An additional step includes an oxygen treatment during the etch to remove polymer from the structure and etch chamber.
Claims20
A method of manufacturing a magnetoresistive-based device, comprising:
- providing a magnetic material layer;
- depositing a electrical conductive layer over the magnetic material layer;
- depositing a hard mask layer over the metal layer;
- depositing a patterned photo resist over the dielectric layer;
- etching the hard mask layer not covered by the photo resist with a selectivity consisting of at least 2:1 or greater of the electrical conductive layer to the photo resist to form a hard mask;
- etching the electrical conductive layer not covered by the hard mask to form an electrode;
- and
- etching the magnetic material layer not covered by the electrode to form a magnetic material stack.
A method of manufacturing a magnetoresistive-based device, including an electrical conductive layer formed over a magnetic material layer, a hard mask layer formed over the electrical conductive layer, and a patterned photo resist formed over the hard mask layer, the method comprising:
- etching the hard mask layer not covered by the patterned photo resist with a selectivity of at least 2:1 to form a hard mask;
- etching the electrical conductive layer not covered by the hard mask to form an electrode;
- and
- etching the magnetic material layer not covered by the electrically conductive electrode to form a magnetic material stack.
Dependencies are inferred from the claim text.