Radiation-sensitive resin composition, method for forming resist pattern, polymer and polymerizable compound
AssigneeJsr Corporation
InventorsYuusuke ASANO, Mitsuo SATOU, Hiromitsu NAKASHIMA, Kazuki KASAHARA, Yoshifumi OIZUMI, Masafumi HORI, Takanori KAWAKAMI, Yasuhiko MATSUDA, Kazuo NAKAHARA
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