Photosensitive resin composition and method of forming pattern using the same
AssigneeSamsung Display Co., Ltd.
InventorsJeong Min PARK, Ji-Hyun KIM, Jung-Soo LEE, Hyoc-Min YOUN
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Abstract
A photosensitive resin composition includes an acryl-based copolymer formed by copolymerizing unsaturated carboxylic acid, unsaturated carboxylic acid anhydride, or a mixture thereof and an olefin-based unsaturated compound or a mixture of olefin-based unsaturated compounds, a photoinitiator represented by the following Chemical Formula 1 or 2, a multifunctional acrylate oligomer, a multifunctional monomer having an ethylenically unsaturated bond, and a melamine crosslinking agent.
Claims16
A photosensitive resin composition comprising:
- an acryl-based copolymer formed by copolymerizing i) at least one of an unsaturated carboxylic acid, an unsaturated carboxylic acid anhydride, and a mixture thereof and ii) at least one of an olefin-based unsaturated compound or a mixture of olefin-based unsaturated compounds,
- a photoinitiator represented by the following Chemical Formula 1 or 2,
- a multifunctional acrylate oligomer,
- a multifunctional monomer having an ethylenically unsaturated bond, and
- a melamine crosslinking agent:
- wherein, in Chemical Formula 1, R1 is an alkyl group having 1 to 8 carbon atoms, R2 is a phenyl group or an alkyl group having 1 to 8 carbon atoms, and R3 to R9 are each independently hydrogen, a halogen atom, or an alkyl group having 1 to 8 carbon atoms, and
- wherein in Chemical Formula 2, R1 is an alkyl group having 1 to 8 carbon atoms, and R2 to R11 are each independently hydrogen, a halogen atom, or an alkyl group having 1 to 8 carbon atoms.
A method of forming a pattern, comprising:
- applying a photosensitive resin composition on a substrate, and
- exposing and developing the photosensitive resin composition,
- wherein the photosensitive resin composition includes
- an acryl-based copolymer formed by copolymerizing i) at least one of an unsaturated carboxylic acid, an unsaturated carboxylic acid anhydride, and a mixture thereof and at least one of an olefin-based unsaturated compound and a mixture of olefin-based unsaturated compounds,
- a photoinitiator represented by the following Chemical Formula 1 or 2,
- a multifunctional acrylate oligomer,
- a multifunctional monomer having an ethylenically unsaturated bond, and
- a melamine crosslinking agent:
- wherein, in Chemical Formula 1, R1 is an alkyl group having 1 to 8 carbon atoms, R2 is a phenyl group or an alkyl group having 1 to 8 carbon atoms, and R3 to R9 are each independently hydrogen, a halogen atom, or an alkyl group having 1 to 8 carbon atoms, and
- wherein in Chemical Formula 2, R1 is an alkyl group having 1 to 8 carbon atoms, and R2 to R11 are each independently hydrogen, a halogen atom, or an alkyl group having 1 to 8 carbon atoms.
Dependencies are inferred from the claim text.