System, Method and Apparatus for Forming a Thin Film Lithium Ion Battery
AssigneeApplejack 199 L.P.
InventorsWenming Li, Byunghoon Yoon, Ann Koo
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Abstract
A system and method of forming a thin film battery includes a substrate, a first current collector formed on the substrate, a cathode layer formed on a portion of the first current collector, a solid layer of electrolyte material formed on the cathode layer, a silicon-metal thin film anode layer formed on the solid layer of electrolyte material and a second current collector electrically coupled to the silicon-metal thin film anode layer. A method and a system for forming the thin film battery are also disclosed.
Claims20
A battery comprising:
- a substrate;
- a first current collector formed on the substrate;
- a cathode layer formed on a portion of the first current collector;
- a layer of solid electrolyte material formed on the cathode layer;
- a silicon-metal thin film anode layer formed on the layer of electrolyte material;
- and
- a second current collector electrically coupled to the silicon-metal thin film anode layer.
A method of forming a thin film battery comprising:
- forming a first current collector on a substrate;
- forming a cathode layer of the first current collector;
- forming a solid electrolyte layer on the cathode layer;
- forming silicon-metal thin film anode layer on the electrolyte layer;
- and
- coupling the silicon-metal thin film anode layer to a second current collector.
A system for making a thin film battery comprising:
- a chamber including:
- at least two sources;
- a transport system capable of transporting a substrate across each one of the at least two sources in an alternating manner;
Dependencies are inferred from the claim text.