Integrated process for conversion of stc-containing and ocs-containing sidestreams into hydrogen-containing chlorosilanes

An integrated system,

• comprising:
• component plant for hydrochlorination of silicon or a component plant for deposition of silicon from a gas phase or both,
• a component plant for a Müller-Rochow synthesis,
• a hydrogenation reactor for hydrogenation of at least silicon tetrachloride and methyltrichlorosilane,
• a component plant for working up a gas mixture formed in the hydrogenation reactor,
• and one or more lines selected from the group consisting of:
• a line for feeding methane obtained by working up the gas mixture to at least one burner for heating the hydrogenation reactor,
• a line for feeding hydrogen obtained working up the gas mixture to the hydrogenation reactor,
• a line for feeding methyltrichlorosilane, silicon tetrachloride, or both, obtained by working up the gas mixture to the hydrogenation reactor,
• a line for feeding HCl, high boilers, or both obtained by working up the gas mixture to the component plant for hydrochlorination of silicon,
• a line for feeding trichlorosilane obtained by working up the gas mixture to the component plant for deposition of silicon from the gas phase,
• a line for withdrawing dichlorosilane, trichlorosilane, or both, obtained by working up the gas mixture,
• a line for withdrawing methyldichlorosilane obtained by working up the gas mixture, and
• a line for withdrawing the high boilers obtained by working up the gas mixture,
• wherein
• the gas mixture comprises a hydrogen-comprising chlorosilane, and
• the integrated system is suitable for a process for producing the gas mixture by working up the gas mixture by separating at least a portion of at least one product and using at least a portion of at least one of optionally multiple separated products in the process.