US 2014/0212088 A1 · OPTICAL DEVICE AND MANUFACTURING METHOD THEREOF

Abstract

An optical device according to an embodiment includes a laser light source, a first optical waveguide that propagates light being output from the laser light source, a first distribution device that distribute the light into n lights, n second optical waveguides that propagates the n lights being output from the first distribution device, n second distribution devices that distribute each of the n lights into m lights, n×m third optical waveguides arranged in a matrix form and propagates the n×m lights being output from the m second distribution devices, a control electrode that apply a voltage or current to each of the third optical waveguides, and control phase of the light propagating through the third optical waveguides, and an output end surface that output the n×m lights.

Claims20

Dependent claims

An optical device comprising:

a laser light source;
a first optical waveguide propagating light, the light being output from the laser light source;
a first distribution device distributing the light into n lights (n is an integer equal to or more than two), the light being input from the first optical waveguide;
n second optical waveguides propagating the n lights, the n lights being output from the first distribution device;
n second distribution devices distributing the n lights being propagated through the n second optical waveguides, each of the n second distribution devices distributing light propagated through each of the n second optical waveguides into m lights (m is an integer equal to or more than two);
n×m third optical waveguides propagating n×m lights, the n×m lights being output from the n second distribution devices;
a plurality of control electrodes applying voltage or current to each of the n×m third optical waveguides individually, and control phase of each of light propagating through the n×m third optical waveguides individually;
and
an output end surface outputting n×m lights, the n×m lights being propagated through the n×m third optical waveguides.

6 more elements

An optical device comprising:

a substrate;
a first wiring isolating layer formed on the substrate and made of a clad material;
a first optical wiring layer formed on the first wiring isolating layer, the first optical wiring layer including,
a first wiring layer clad made of the clad material, and
a first optical waveguide, both sides of the first optical waveguide being sandwiched by the first wiring layer clad, the first optical wave guide being made of a first core material having refractive index higher than the clad material;
a second optical wiring layer formed above the first wiring isolating layer, the second optical wiring layer including,
a second wiring layer clad being made of the clad material, and
a second optical waveguide extending away from and substantially parallel to the first optical waveguide, both sides of the second optical waveguide being sandwiched by the second wiring layer clad, the second optical waveguide being made of the first core material;
and
a second wiring isolating layer formed between the first optical wiring layer and the second optical wiring layer, the second wiring isolating layer including,
an surrounding layer made of the clad material, and
a connection unit being encircled by the surrounding layer, the connection unit being in contact with the upper surface of the first optical waveguide and the lower surface of the second optical waveguide, the connection unit being made of a second core material having a refractive index higher than the first core material,
wherein when the first optical waveguide, the connection unit, and the second optical waveguide are projected onto a plane parallel to the substrate, the connection unit is at an inner side with respect to outer edges of any one of the first optical waveguide and the second optical waveguide.

10 more elements

An optical device comprising:

a substrate;
a first wiring isolating layer formed on the substrate and made of a clad material;
a first optical wiring layer formed on the first wiring isolating layer, the first optical wiring layer including,
a first wiring layer clad made of the clad material, and
a first optical waveguide, both sides of the first optical waveguide being sandwiched by the first wiring layer clad, first optical waveguide being made of a first core material having refractive index higher than the clad material;
a first boundary layer formed on the first optical wiring layer, the first boundary layer being made of a boundary material having a refractive index higher than the clad material and lower than the first core material;
a second boundary layer formed above the first boundary layer and made of the boundary material;
a second optical wiring layer formed on the second boundary layer, the second optical wiring layer including,
a second wiring layer clad being made of the clad material,
a second optical waveguide, both sides of the second optical waveguide being sandwiched by the second wiring layer clad, the second optical waveguide extending substantially parallel to the first optical waveguide, the second optical waveguide being made of the first core material;
and
a second wiring isolating layer formed between the first boundary layer and the second boundary layer, the second wiring isolating layer including,
an surrounding layer made of the clad material, and
a connection unit being encircled by the surrounding layer, the connection unit being in contact with the upper surface of the first boundary layer and the lower surface of the second boundary layer, the connection unit being made of a second core material having a refractive index higher than the boundary material,
wherein when the first optical waveguide, the connection unit, the second optical waveguide are projected onto a plane parallel to the substrate, there is a region in which all of the first optical waveguide, the connection unit, and the second optical waveguide overlap each other.

12 more elements

An optical device comprising:

a substrate;
a first wiring isolating layer formed on the substrate and made of a clad material;
a first optical wiring layer formed on the first wiring isolating layer, the first optical wiring layer including,
a first wiring layer clad made of the clad material, and
a first optical waveguide, both sides of the first optical waveguide being sandwiched by the first wiring layer clad, the first optical waveguide being made of a first core material having refractive index higher than the clad material;
a second optical wiring layer formed above the first wiring isolating layer, the second optical wiring layer including,
a second wiring layer clad made of the clad material, and
a second optical waveguide extending away from and substantially parallel to the first optical waveguide, both sides of the second optical waveguide being sandwiched by the second wiring layer clad, the second optical waveguide being made of the first core material;
and
a second wiring isolating layer formed between the first optical wiring layer and the second optical wiring layer, the second wiring isolating layer including,
an surrounding layer made of the clad material, and
a connection unit being encircled by the surrounding layer, the connection unit being provided between the first optical waveguide and the second optical waveguide, the connection unit being made of a second core material having a refractive index higher than the first core material,
wherein when the first optical waveguide, the connection unit, the second optical waveguide are projected onto a plane parallel to the substrate, there is a region in which all of the first optical waveguide, the connection unit, and the second optical waveguide overlap each other, and
wherein where a total thickness of a core layer from a lower surface of the first optical waveguide to an upper surface of the second optical waveguide in a region where the connection unit exists is denoted as H, an average refractive index of the core layer weighted with thickness is denoted as ncore, and a central wavelength of light is denoted as λ,
a length L of the connection unit satisfies the formula (I), the number of modes interfering in the core layer of the thickness H is three, and, among modes, a relationship of formula (II) is satisfied between a difference Δn01 of effective refractive indexes in a mode in which the effective refractive index is largest and a mode in which the effective refractive index is second largest and the difference Δn12 of effective refractive indexes in a mode in which the effective refractive index is second largest and a mode in which the effective refractive index is lowest.
L
<
2

n
core

H
2
λ
Formula


(
I
)
0.425

λ
L
≤
Δ


n
01
,
Δ


n
12
≤
0.575


λ
L
Formula


(
II
)

56 more elements

Dependencies are inferred from the claim text.

Optical device and manufacturing method thereof

Life of this patent

Optical device and manufacturing method thereof

Life of this patent

Abstract

Claims20