Temperature sensor and heat treating apparatus
AssigneesFenwal Controls of Japan, Ltd., Tokyo Electron Limited
InventorsTAKANORI SAITO, KOJI YOSHII, TSUTOMU KURIHARA, TOMOYA OKAMURA
Life of this patent
Estimating the term…
Loading patent…
AssigneesFenwal Controls of Japan, Ltd., Tokyo Electron Limited
InventorsTAKANORI SAITO, KOJI YOSHII, TSUTOMU KURIHARA, TOMOYA OKAMURA
Estimating the term…
A temperature detecting element is fixed reliably at an accurate position to enable improvement in a rising characteristic of a temperature and high-accuracy temperature control. Provided is a temperature sensor including a temperature detecting element detecting a temperature in a branch tube branched from a main tube and a positioning supporting mechanism positioning and supporting the temperature detecting element. Tension is applied to a cord of the temperature detecting element. The positioning supporting mechanism is supported by the tensioned cord to position and support the temperature detecting element. The positioning supporting mechanism includes a supporting tube supporting the temperature detecting element, a positioning member supporting the supporting tube and fixed at a set position, and a tensioner applying tension to the cord of the temperature detecting element.
A temperature sensor comprising:
(canceled)
(canceled)
Dependencies are inferred from the claim text.