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US 2014/0211315 A1Published application
Optical module, and electronic apparatus
AssigneeSeiko Epson Corporation
InventorTomonori MATSUSHITA
Life of this patent
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Abstract
An optical module includes a stationary substrate, a movable substrate, a stationary reflecting film provided to the stationary substrate, a movable reflecting film provided to the movable substrate and opposed to the stationary reflecting film, a first control electrode disposed outside the stationary reflecting film in a filter plan view, a second control electrode disposed outside the movable reflecting film in the filter plan view, and opposed to the first control electrode, and a tilt control section adapted to make a first control current flow through the first control electrode, and make a second control current, which has an opposite direction to the first control current in the filter plan view, flow through the second control electrode.
Claims16
An optical module comprising:
- a first substrate;
- a second substrate disposed so as to be opposed to the first substrate;
- a first reflecting film provided to the first substrate;
- a second reflecting film provided to the second substrate, and opposed to the first reflecting film;
- a first control electrode provided to the first substrate;
- a second control electrode provided to the second substrate, and opposed to the first control electrode;
- and
- a tilt control section adapted to make a first control current flow through the first control electrode in a first direction along a substrate surface of the first substrate, and make a second control current flow through the second control electrode in a second direction along a substrate surface of the second substrate, the second direction being opposite to the first direction in a plan view of the first substrate and the second substrate viewed from a substrate thickness direction.
5 more elements
An optical module comprising:
- at least one first reflecting film having electrical conductivity, and adapted to reflect a part of incident light and transmit a part of the incident light;
- at least one second reflecting film having electrical conductivity, opposed to the first reflecting film, and adapted to reflect a part of the incident light and transmit a part of the incident light;
- and
- a tilt control section adapted to make a first control current flow through the first reflecting film in a first direction along a surface direction of the first reflecting film, and make a second control current flow through the second reflecting film in a second direction along a surface direction of the second reflecting film, the second direction being opposite to the first direction in a plan view of the first reflecting film and the second reflecting film viewed from a film thickness direction.
1 more element
An electronic apparatus comprising:
- an optical module including
- a first substrate,
- a second substrate disposed so as to be opposed to the first substrate,
- a first reflecting film provided to the first substrate,
- a second reflecting film provided to the second substrate, and opposed to the first reflecting film,
- a first control electrode provided to the first substrate,
- a second control electrode provided to the second substrate, and opposed to the first control electrode, and
- a tilt control section adapted to make a first control current flow through the first control electrode in a first direction along a substrate surface of the first substrate, and make a second control current flow through the second control electrode in a second direction along a substrate surface of the second substrate, the second direction being opposite to the first direction in a plan view of the first substrate and the second substrate viewed from a substrate thickness direction;
- and
- a control section adapted to control the optical module.
7 more elements
An electronic apparatus comprising:
- an optical module including
- a first reflecting film having electrical conductivity,
- a second reflecting film having electrical conductivity, and opposed to the first reflecting film, and
- a tilt control section adapted to make a first control current flow through the first reflecting film in a first direction along a surface direction of the first reflecting film, and make a second control current flow through the second reflecting film in a second direction along a surface direction of the second reflecting film, the second direction being opposite to the first direction in a plan view of the first reflecting film and the second reflecting film viewed from a film thickness direction;
- and
- a control section adapted to control the optical module.
3 more elements
An optical module comprising:
- a first substrate;
- a first reflecting film provided to the first substrate;
- a second reflecting film opposed to the first reflecting film;
- a first control electrode, which is provided to the first substrate, and through which a first control current flows in a first direction along a substrate surface of the first substrate;
- and
- a second control electrode, which is provided to a same base member as the second reflecting film so as to be opposed to the first control electrode, and through which a second control current flows in a second direction opposite to the first direction in a plan view viewed from a thickness direction of the first substrate.
3 more elements
Dependencies are inferred from the claim text.