Optical individual-point measurement
AssigneesHexagon Metrology, Inc., Hexagon Technology Center GmbH
InventorsThomas JENSEN, Knut SIERCKS, Peter CHAMP, Matthias GEIL
Life of this patent
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AssigneesHexagon Metrology, Inc., Hexagon Technology Center GmbH
InventorsThomas JENSEN, Knut SIERCKS, Peter CHAMP, Matthias GEIL
Estimating the term…
A distance measuring method for a point on an object is performed by emitting measurement radiation. When an optical measurement axis of the measurement radiation is aligned with the point to be measured, an optical measurement point region is defined by the beam cross section of the radiation on the object. The beam cross section may be, for example, a maximum of eight times the standard deviation of a Gaussian steel profile of the measurement radiation. The distance to the point on the object is determined by receiving measurement radiation reflected from the object. The method includes altering, at least once, a measurement direction as emission direction of the measurement radiation with respective emission and reception of the measurement radiation. Altering the measurement direction is carried out such that respective area centroids defined by the beam cross section on the object lie within the measurement point region.
1-15. (canceled)
A distance measuring method for a point to be measured on an object, comprising:
A measuring apparatus for determining the distance to a point to be measured on an object, comprising:
Dependencies are inferred from the claim text.