Illumination optical assembly, exposure device, and device manufacturing method

An illumination optical system for illuminating an illumination objective surface with light from a light source, the illumination optical system comprising:

• a first spatial light modulator which has a plurality of optical elements arranged on a first plane and controlled individually;
• a polarizing member which is arranged in an optical path on an illumination objective surface side with respect to the first plane and which gives a change of a polarization state to a first light beam passing through a first area in a plane intersecting an optical axis of the illumination optical system, the change of the polarization state being different from a change of the polarization state given to a second light beam passing through a second area in the intersecting plane, the second area being different from the first area;
• and
• a second spatial light modulator which has a plurality of optical elements controlled individually and arranged on a second plane in the optical path on the illumination objective surface side with respect to the first plane or in an optical path on a light source side with respect to the first plane, and which variably forms a light intensity distribution on an illumination pupil of the illumination optical system.