Liquid ejecting head, liquid ejecting apparatus, piezoelectric element and sensor
AssigneeSeiko Epson Corporation
InventorTetsuya Isshiki
Life of this patent
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Abstract
A liquid ejecting head including a piezoelectric element, the piezoelectric element includes: a first electrode; an orientation control layer provided on the first electrode, the orientation control layer having a perovskite structure including Bi in an A site and Fe and Ti in a B site, and the orientation control layer being self-oriented in a (100) plane; a piezoelectric body layer provided on the orientation control layer and made of a piezoelectric material of the perovskite structure preferentially oriented in the (100) plane; and a second electrode provided on the piezoelectric body layer.
Claims10
A liquid ejecting head including a piezoelectric element, the piezoelectric element comprising:
- a first electrode;
- an orientation control layer provided on the first electrode, the orientation control layer having a perovskite structure including Bi in an A site and Fe and Ti in a B site, and the orientation control layer being self-oriented in a (100) plane;
- a piezoelectric body layer provided on the orientation control layer and made of a piezoelectric material of the perovskite structure preferentially oriented in the (100) plane;
- and
- a second electrode provided on the piezoelectric body layer.
A piezoelectric element comprising:
- a seed layer having a perovskite structure including Bi in an A site and Fe and Ti in a B site, and the seed layer being self-oriented in a (100) plane;
- and
- a piezoelectric body layer made of a piezoelectric material of the perovskite structure provided on the seed layer, the piezoelectric body layer being preferentially self-oriented in the (100) plane.
Dependencies are inferred from the claim text.