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US 2014/0210570 A1Published application
Piezoelectric thin film resonator, filter, and duplexer
AssigneeTaiyo Yuden Co., Ltd.
InventorsTokihiro NISHIHARA, Takeshi SAKASHITA
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Abstract
A piezoelectric thin film resonator includes: a substrate; a piezoelectric film located on the substrate; a lower electrode and an upper electrode facing each other across at least a part of the piezoelectric film; and an insertion film that is inserted into the piezoelectric film, is located in at least a part of an outer periphery region in a resonance region in which the lower electrode and the upper electrode face each other across the piezoelectric film, and is not located in a center region of the resonance region.
Claims15
A piezoelectric thin film resonator comprising:
- a substrate;
- a piezoelectric film located on the substrate;
- a lower electrode and an upper electrode facing each other across at least a part of the piezoelectric film;
- and
- an insertion film that is inserted into the piezoelectric film, is located in at least a part of an outer periphery region in a resonance region in which the lower electrode and the upper electrode face each other across the piezoelectric film, and is not located in a center region of the resonance region.
2 more elements
Dependencies are inferred from the claim text.