Test apparatus having a probe card and connector mechanism

A test apparatus for testing a semiconductor device comprising:

• a circuit board having a pattern of signal contacts and a pattern of guard contacts, the circuit board is configured as a plate having a top side, a bottom side, and an opening through the top and bottom sides;
• and
• a probe card including a wire guide, a probe tile connected with the wire guide, a plurality of probe wires supported by the wire guide and probe tile, each probe wire is positioned through the wire guide and the probe tile, each probe wire includes a probe tip extending through the probe tile, the probe tips forming an array to probe a device under test, each probe wire includes a signal transmitting portion and a guard portion exposed from the wire guide, the signal transmitting portions and the guard portions form a contact pattern and, with the array, are disposed on one side of the probe card, and a retainer member is disposed on another side of the probe card,
• wherein the probe tile is insertable into the opening of the circuit board to allow the array to probe a device under test, and the contact pattern of the probe card is contactable with the pattern of signal contacts and guard contacts on the circuit board, such contact of the probe card with the circuit board allows signals to be transferred through the probe wires and circuit board.

A method of probing devices under test comprising:

• positioning a holder into a probe position, which includes retaining a probe card on a side of the holder;
• positioning, using the holder, the probe card onto a circuit board and onto a device under test, the circuit board having a pattern of signal contacts and a pattern of guard contacts, the probe card including a plurality of probe wires, each probe wire includes a probe tip extending through the probe tile, the probe tips forming an array to probe the device under test, each probe wire includes a signal transmitting portion and a guard portion exposed from a wire guide, the signal transmitting portions and the guard portions form a contact pattern and, with the array, are disposed on a side of the probe card that is different from the side retained to the holder, and to respectively contact the pattern of signal contacts and the pattern of guard contacts on the circuit board, and contact the device under test;
• probing the device under test using the array;
• and
• transmitting signals through the array to a test equipment by way of contact of the probe card with the circuit board and of contact of the probe card with the device under test, which allows signals to be transferred through the probe wires and circuit board.