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US 2014/0210500 A1Published application
Semiconductor evaluating device and semiconductor evaluating method
AssigneeMitsubishi Electric Corporation
InventorsHajime AKIYAMA, Akira OKADA, Kinya YAMASHITA
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Abstract
A semiconductor evaluating device includes a chuck stage for holding a semiconductor device serving as a measuring object, a contact probe for evaluating an electrical characteristic of the semiconductor device by getting contact with the semiconductor device held on the chuck stage, and a fluid spraying portion for spraying a fluid onto the semiconductor device.
Claims20
A semiconductor evaluating device comprising:
- a chuck stage for holding a measuring object;
- a contact probe for evaluating an electrical characteristic of said measuring object held on said chuck stage in contact with said measuring object;
- and
- a fluid spraying portion for spraying a fluid onto said measuring object.
1 more element
Dependencies are inferred from the claim text.