Mems vibrating structure using an orientation dependent single-crystal piezoelectric thin film layer

A micro-electrical-mechanical system (MEMS) vibrating structure adapted to predominantly vibrate in a shear-horizontal mode of vibration and comprising:

• a carrier substrate;
• a first anchor on a first surface of the carrier substrate;
• a second anchor on the first surface of the carrier substrate;
• a single-crystal piezoelectric body suspended between the first anchor and the second anchor and including a first surface parallel to and facing the carrier substrate and a second surface opposite the first surface, the single-crystal piezoelectric body including a uniform crystalline orientation defined by a first Euler angle (φ), a second Euler angle (θ), and a third Euler angle (ψ);
• and
• a first conductive layer on the first surface of the single-crystal piezoelectric body, the first conductive layer comprising a first conductive section over the first anchor and a portion of the single-crystal piezoelectric body and a second conductive section over the second anchor and a portion of the single-crystal piezoelectric body;
• and
• a second conductive layer on the second surface of the single-crystal piezoelectric body, the second conductive layer comprising a first conductive section approximately aligned with the first conductive section of the first conductive layer and a second conductive section approximately aligned with the second conductive section.