Flip-chip hybridization of microelectronic components by local heating of connecting elements
AssigneeCommissariat A L'energie Atomique Et Aux Energies Alternatives
InventorAbdelkader ALIANE
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AssigneeCommissariat A L'energie Atomique Et Aux Energies Alternatives
InventorAbdelkader ALIANE
Estimating the term…
A method of forming a hybridized device including forming a first component provided with metal bumps, and a second component provided with connection elements, attaching the bumps to the connection elements. The manufacturing of the second component includes forming, on a surface of a substrate, resistive elements at the locations provided for the connection elements; depositing an electric insulator layer at least on the resistive elements; and forming the connection elements, each comprising a metal well having an opening capable of receiving the corresponding metal bump of the first microelectronic component and at least partially filled with a fusible element, particularly indium or an alloy of tin and gold, or with a conductive ink, particularly based on silver or copper. Further, the attachment of the balls to the connection elements comprises applying an electric current through the resistive elements to heat the bumps.
A method of forming a hybridized device comprising:
A hybridized device comprising:
A device intended to be hybridized with another device provided with metal bumps, comprising:
Dependencies are inferred from the claim text.