Nanowire Capacitor for Bidirectional Operation
AssigneeInternational Business Machines Corporation
InventorsSarunya Bangsaruntip, Amlan Majumdar, Jeffrey W. Sleight
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AssigneeInternational Business Machines Corporation
InventorsSarunya Bangsaruntip, Amlan Majumdar, Jeffrey W. Sleight
Estimating the term…
A method of fabricating an electronic device includes the following steps. At least one first set and at least one second set of nanowires and pads are etched in an SOI layer of an SOI wafer. A first gate stack is formed that surrounds at least a portion of each of the first set of nanowires that serves as a channel region of a capacitor device. A second gate stack is formed that surrounds at least a portion of each of the second set of nanowires that serves as a channel region of a FET device. Source and drain regions of the FET device are selectively doped. A first silicide is formed on the source and drain regions of the capacitor device that extends at least to an edge of the first gate stack. A second silicide is formed on the source and drain regions of the FET device.
An electronic device, comprising:
An electronic device, comprising:
Dependencies are inferred from the claim text.