Stationary vibration isolation system and method for controlling a vibration isolation system
AssigneeIntegrated Dynamics Engineering GmbH
InventorsPeter A. Kropp, Peter Kluth
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Abstract
The invention relates to a stationary vibration isolation system and to a method for controlling such a system which comprises a damper effective in a horizontal direction which includes a fluid of variable viscosity.
Claims15
A stationary vibration isolation system, comprising a load that is anti-vibration mounted in a horizontal direction and vertical direction on a base and which comprises a moving mass;
- wherein the vibration-isolated load is coupled to the base via a damper which is effective in the horizontal direction and which comprises a fluid of variable viscosity.
A method for controlling a vibration isolation system, wherein said vibration isolation system comprises a lithography apparatus including a moving mass, and wherein based on a motion of said mass a damper which is effective at least in a horizontal direction and which comprises an electrorheological or magnetorheological fluid is controlled in a manner so that the damping effect increases upon a change in motion of the mass.
Dependencies are inferred from the claim text.