Method for the Fabrication of Electrolyte Cavities Using Surface Micromachining

Abstract

The present invention is directed to the fabrication of thin aluminum anode batteries using a highly reproducible process that enables high volume manufacturing of the galvanic cells. A method of fabricating a thin aluminum anode galvanic cell is provided, the method including, depositing a layer of catalytic metal on a surface of a first substrate, depositing and patterning a benzocyclobutene layer to form a reservoir having four sidewalls of benzocyclobutene on the surface of the catalytic layer, depositing a layer of aluminum on a surface of a second substrate and bonding the first substrate to the second substrate to form a galvanic cell bounded by the catalytic metal layer and the aluminum layer and separated by the reservoir walls of benzocyclobutene, the second substrate positioned in overlying relation to contact the four sidewalls of the reservoir with the aluminum layer facing the catalytic layer.

Dependencies are inferred from the claim text.