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US 2014/0209475 A1Published application
Nanohair structure and an application therefor
AssigneeKorea University Research and Business Foundation
InventorsYoung Keun KIM, Jee-Won LEE, Jin-Seung PARK, Moon Kyu CHO, Eun Jung LEE
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Abstract
There is provided a nanohair structure with the nanowires exposed on a nanotemplate; the method thereof; and a three-dimensional nanostructure-based sensor with ultra-sensitivity and greatly increased three-dimensional surface-to-volume ratio which immobilizes bio-nanoparticles to the nanohair structure and arranges antibodies to the nano surface with the controlled orientation by physical interaction.
Claims13
A nanohair structure comprising:
- (a) a nanotemplate comprising a plurality of pores;
- (b) a plurality of nanowires grown through the pores of the nanotemplate, wherein one portion of the nanowires is embedded inside the nanotemplate, while the other portion of the nanowires is exposed vertically on top of the surface of the nanotemplate and the exposed portion has a regular height;
- and
- (c) a probe for detecting a target material which is immobilized to the exposed portion of the nanowires.
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A method of producing the nanohair structure comprising,
- a) preparing a nanotemplate with a plurality of pores;
- b) generating electrode layer on one side of the nanotemplate;
- c) putting the nanotemplate into the solution containing the metal ion and growing the metal nanowire through pores of the nanotemplate by electrodeposition employing it as a cathode;
- d) planarizing the metal nanowire through a process of chemical mechanical planarization (CMP);
- e) selectively reactive ion etching (RIE) of the nanotemplate;
- and
- f) immobilizing a probe for detecting a target material to the metal nanowire.
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Dependencies are inferred from the claim text.