Electrolytic process using cation permeable barrier

A process for electrolytically processing a microfeature workpiece as the working electrode with a first processing fluid and a counter electrode, comprising:

• (a) contacting a surface of the microfeature workpiece with the first processing fluid, the first processing fluid comprising first processing fluid species including a first metal cation;
• (b) contacting the counter electrode with a second processing fluid;
• (c) producing an electrochemical reaction at the counter electrode to produce a second metal cation, wherein the pH of the second processing fluid is higher than the pH of the first processing fluid;
• (d) providing a cation exchange membrane to allow the second metal cation to move from the second processing fluid to the first processing fluid, but to substantially prevent movement of the first metal cation from the first processing fluid to the second processing fluid;
• and
• (e) electrolytically depositing the first and second metal cations onto the surface of the microfeature workpiece.

A process for electrolytically processing a microfeature workpiece as the cathode with a first processing fluid and an anode, comprising:

• (a) contacting a surface of the microfeature workpiece with the first processing fluid, the first processing fluid comprising first processing fluid species including a first metal cation;
• (b) contacting the anode with a second processing fluid;
• (c) consuming the anode to produce a second metal cation, wherein the pH of the second processing fluid is higher than the pH of the first processing fluid;
• (d) providing a cation exchange membrane to allow the second metal cation to move from the second processing fluid to the first processing fluid, but to substantially prevent movement of the first metal cation from the first processing fluid to the second processing fluid;
• and
• (e) electrolytically depositing the first and second metal cations onto the surface of the microfeature workpiece.