Detaching apparatus and detaching method
AssigneeDainippon Screen Mfg. Co., Ltd.
InventorsMasafumi KAWAGOE, Kazuhiro SHOJI, Yayoi SHIBAFUJI, Mikio MASUICHI, Hiroyuki UENO, Miyoshi UENO, Kazutaka TANIGUCHI
Life of this patent
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Abstract
In a detaching apparatus, a detachment starter bends one end part of a first plate-like body into a cylindrical or prismatic surface in a direction opposite to a second plate-like body, thereby forming a single and straight boundary line between an adhering region and a detached region. A separator increases a distance between a first holder holding the first plate-like body and a second holder holding the second plate-like body to separate the first and second plate-like bodies.
Claims26
A detaching apparatus for detaching a first plate-like body and a second plate-like body adhering to each other, the apparatus comprising:
- a first holder that holds the first plate-like body;
- a detachment starter that bends one end part of the first plate-like body into a cylindrical or prismatic surface in a direction opposite to the second plate-like body, thereby converting a part of an adhering region of the second plate-like body adhering to the first plate-like body into a detached region detached from the first plate-like body and forming a single and straight boundary line between the adhering region and the detached region;
- a second holder that holds the second plate-like body formed with the detached region;
- and
- a separator that increases a distance between the first and second holders to separate the first and second plate-like bodies.
A detaching apparatus for detaching a first plate-like body and a second plate-like body adhering to each other via a thin film or a pattern, the apparatus comprising:
- a holder that has a holding surface larger than a planar size of an effective region of the first plate-like body in which the thin film or the pattern is effectively carried and is configured to hold the first plate-like body by the contact of the holding surface with a surface of the first plate-like body opposite to a surface adhering to the second plate-like body;
- a contactor that has a roller shape whose axial direction is perpendicular to a detachment progressing direction, is configured to be movable in the detachment progressing direction and forms a contact nip by coming into contact with a surface of the second plate-like body opposite to a surface adhering to the first plate-like body at a contact start position downstream of the one end part in the detachment progressing direction, the detachment progressing direction being a direction from one end part to another end part of the second plate-like body along the second plate-like body;
- a detacher that holds and moves the one end part in a direction away from the holder, thereby detaching the one end part from the first plate-like body;
- an imager that images a boundary line formed on a boundary between an undetached region of the first plate-like body adhering to the second plate-like body and a detached region thereof detached from the second plate-like body via the first plate-like body;
- and
- a movement controller that detects the position of the boundary line based on an image imaged by the imager and controls a movement of the contactor based on the detection result, wherein
- the contactor starts moving in the detachment progressing direction from the contact start position when the boundary line reaches a position corresponding to an upstream end part of the contact nip in the detachment progressing direction.
A detaching method for detaching a first plate-like body and a second plate-like body adhering to each other, the method comprising:
- a boundary line forming step of bending one end part of the first plate-like body into a cylindrical or prismatic surface in a direction opposite to the second plate-like body, thereby converting a part of an adhering region of the second plate-like body adhering to the first plate-like body into a detached region detached from the first plate-like body and forming a single and straight boundary line between the adhering region and the detached region;
- and
- a detaching step of moving the boundary line toward the adhering region while maintaining the boundary line straight by relatively moving the first and second plate-like bodies in a separating direction.
A detaching method for detaching a first plate-like body and a second plate-like body adhering to each other via a thin film or a pattern, the method comprising:
- a step of holding the first plate-like body by bringing a surface opposite to a surface adhering to the second plate-like body into contact with a holding surface having a planner size larger than a planar size of an effective region of the first plate-like body in which the thin film or the pattern is effectively carried;
- a step of forming a contact nip by bringing a roller-shaped contactor whose axial direction is perpendicular to a detachment progressing direction into contact with a surface of the second plate-like body opposite to a surface adhering to the first plate-like body at a contact start position downstream of the one end part in the detachment progressing direction, the detachment progressing direction being a direction from one end part to another end part of the second plate-like body is the detachment progressing direction along the second plate-like body;
- a step of moving the one end part of the second plate-like body in a direction away from the first plate-like body, thereby detaching the one end part of the second plate-like body from the first plate-like body;
- a step of imaging a boundary line formed on a boundary between an undetached region of the first plate-like body adhering to the second plate-like body and a detached region thereof detached from the second plate-like body via the first plate-like body;
- and
- a step of calculating a time, at which the boundary line reaches a position corresponding to an upstream end part of the contact nip in the detachment progressing direction, based on an imaged image and causing the contactor to start moving in the detachment progressing direction from the contact start position at the calculated time.
Dependencies are inferred from the claim text.