Removing a sheet from the surface of a melt using gas jets
AssigneeVarian Semiconductor Equipment Associates, Inc.
InventorsPeter L. Kellerman, Gregory D. Thronson, Dawei Sun
Life of this patent
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Abstract
In one embodiment, a sheet production apparatus comprises a vessel configured to hold a melt of a material. A cooling plate is disposed proximate the melt and is configured to form a sheet of the material on the melt. A first gas jet is configured to direct a gas toward an edge of the vessel. A sheet of a material is translated horizontally on a surface of the melt and the sheet is removed from the melt. The first gas jet may be directed at the meniscus and may stabilize this meniscus or increase local pressure within the meniscus.
Claims8
A sheet production apparatus comprising:
- a vessel configured to hold a melt of a material;
- a cooling plate disposed proximate said melt, said cooling plate configured to form a sheet of said material that is horizontal on said melt proximate said cooling plate;
- and
- a first gas jet configured to direct a gas toward an edge of said vessel.
Dependencies are inferred from the claim text.