Sensor with energy-harvesting device
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsTien-Kan CHUNG, Wen-Chuan TAI, Yao-Te HUANG, Hsin-Ting HUANG, Shang-Ying TSAI, Chang-Yi YANG, Chia-Ming HUNG
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Abstract
A method of fabricating a device includes forming a moveable plate over a substrate, and forming an energy harvesting coil in the moveable plate. The method further includes forming at least one connector connecting the movable plate with the energy harvesting coil, wherein a portion of the energy harvesting coil extends along the at least one connector. The method further includes forming electrodes around the moveable plate, the electrodes adapted to sense motion of the moveable plate.
Claims20
A method of fabricating a device comprising:
- forming a moveable plate over a substrate;
- forming an energy harvesting coil in the moveable plate;
- forming at least one connector connecting the movable plate with the energy harvesting coil, wherein a portion of the energy harvesting coil extends along the at least one connector;
- and
- forming electrodes around the moveable plate, the electrodes adapted to sense motion of the moveable plate.
A method of fabricating energy harvesting device, the method comprising:
- bonding a silicon wafer to a substrate;
- patterning the bonded silicon wafer to form a moveable plate;
- patterning the bonded silicon wafer to form an energy harvesting coil;
- patterning the bonded silicon wafer to form at least one connector connecting the movable plate with an outer portion of the bonded silicon wafer, wherein a portion of the energy harvesting coil extends along the at least one connector;
- and
- forming electrodes on the substrate, wherein the electrodes adapted to sense motion of the moveable plate.
A method of fabricating energy harvesting device, the method comprising:
- forming a polysilicon layer over a substrate;
- patterning the polysilicon layer to form a moveable plate;
- patterning the polysilicon layer to form an energy harvesting coil;
- patterning the polysilicon layer to form at least one connector connecting the movable plate with an outer portion of the polysilicon layer, wherein a portion of the energy harvesting coil extends along the at least one connector;
- and
- forming electrodes on the substrate, wherein the electrodes adapted to sense motion of the moveable plate.
Dependencies are inferred from the claim text.