Modified polysilazane film and method for producing gas barrier film
AssigneeLintec Corporation
InventorsSatoshi Naganawa, Yuta Suzuki
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Abstract
Provided are a modified polysilazane film that is preferable as an intermediate material for forming a predetermined gas barrier film, and a method for producing a gas barrier film having excellent gas barrier properties using such modified polysilazane film as an intermediate material. A modified polysilazane film comprising a substrate and a modified polysilazane layer formed thereon, and a method for producing a gas barrier film obtained through such intermediate material, wherein the modified polysilazane layer has a thickness of a value in the range of 10 to 500 nm, and the modified polysilazane layer has a refractive index of a value in the range of 1.48 to 1.63.
Claims10
A modified polysilazane film comprising a substrate and a modified polysilazane layer formed thereon, wherein the modified polysilazane layer has a thickness of a value in the range of 10 to 500 nm, and the modified polysilazane layer has a refractive index of a value in the range of 1.48 to 1.63.
A method for producing a gas barrier film using a modified polysilazane film comprising a substrate and a modified polysilazane layer formed thereon, comprising the following steps (1) to (3):
- (1) a polysilazane layer forming step, comprising forming a polysilazane layer on a substrate;
- (2) an intermediate treatment step, comprising heat-treating the obtained polysilazane layer to form a modified polysilazane layer having a thickness of a value in the range of 10 to 500 nm and a refractive index of a value in the range of 1.48 to 1.63 to thereby give a modified polysilazane film as an intermediate material;
- and (3) a plasma ion implantation step, comprising conducting a plasma ion implantation process into the modified polysilazane layer of the obtained modified polysilazane film to form the modified polysilazane layer into a gas barrier layer to thereby give a gas barrier film comprising the substrate and the gas barrier layer formed thereon.
Dependencies are inferred from the claim text.