# US 2014/0197898 A1 · High Sensitivity Micro-Piezoelectric Tunable Resonator

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- Number: US 2014/0197898 A1
- Document ID: US20140197898A1
- Status: Published application
- Kind: A1
- Application number: 13/744,064
- Filed: 2013-01-17
- Published: 2014-07-17
- Earliest claimed: 2013-01-17
- Inventors: Ying Hsu; Mike Tracy; Brian Bircumshaw; Ning Chen; Salah Uddin
- Web page: https://patentgrep.com/patent/US20140197898A1

## CPC

- H03H 9/2463: {Clamped-clamped beam resonators}
- H03H 2009/02165: {Tuning}
- H03H: IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS (waveguides, resonators, lines or other devices of the waveguide type H01P)

## Abstract

A highly sensitive micro-piezoelectric tunable resonator element and device that uses a tapered transition region from the actuator and sensor elements to the resonator beam to permit maximum mechanical energy transfer to the beam. A dual-resonator beam embodiment with a shared tuning element is provided in an alternative embodiment.

## Claims

### Claim 1

A tunable resonator comprising:
a first terminal portion,
a resonant actuator element,
a sensor element,
a resonator beam in mechanical connection with the resonant actuator element and the sensor element, and,
a second terminal portion.

### Claim 2 (depends on 1)

The tunable resonator of claim 1 further comprising a transition region between the resonator beam and the resonant actuator element or the sensor element that is tapered.

### Claim 3 (depends on 2)

The tunable resonator of claim 2 wherein the transition region comprises a predetermined angle.

### Claim 4 (depends on 2)

The tunable resonator of claim 2 wherein the transition region comprises a predetermined radius.

### Claim 5

A tunable resonator comprising:
a base substrate,
a first terminal portion,
a resonant actuator element,
a sensor element,
a resonator beam in mechanical connection with the resonant actuator element and the sensor element,
a tuning actuator element, and,
a second terminal portion.

### Claim 6 (depends on 5)

The tunable resonator of claim 5 comprising a transition region between the resonator beam and the resonant actuator element or the sensor element that is tapered.

### Claim 7 (depends on 6)

The tunable resonator of claim 6 wherein the transition region comprises a predetermined angle.

### Claim 8 (depends on 6)

The tunable resonator of claim 6 wherein the transition region comprises a predetermined radius.

### Claim 9

A dual-beam tunable resonator comprising:
a plurality of resonant actuator elements,
a plurality of sensor elements,
a plurality of resonator beams each of which is in mechanical connection with at least one of the resonant actuator elements and at least one of the sensor elements, and,
a shared tuning actuator configured to permit the common tuning of a resonant frequency of the plurality of resonator beams.

### Claim 10 (depends on 9)

The tunable resonator of claim 9 comprising a transition region between at least one resonator beam and at least one of the resonant actuator elements or the sensor elements that is tapered.

### Claim 11 (depends on 10)

The tunable resonator of claim 10 wherein at least one of the transition regions comprises a predetermined angle.

### Claim 12 (depends on 10)

The tunable resonator of claim 10 wherein at least one of the transition regions comprises a predetermined radius.

### Claim 13 (depends on 9)

The tunable resonator of claim 9 further comprising differential amplifier circuitry configured for the differential sensing of the outputs of a plurality of sensor elements.