# US 2014/0197859 A1 · Probe Head

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- Number: US 2014/0197859 A1
- Document ID: US20140197859A1
- Status: Published application
- Kind: A1
- Application number: 14/150,745
- Filed: 2014-01-08
- Published: 2014-07-17
- Earliest claimed: 2013-01-11
- Assignees: Mpi Corporation
- Applicants: MPI Corporation
- Inventors: Horng- Kuang FAN; Hsien-Ta HSU
- Web page: https://patentgrep.com/patent/US20140197859A1

## CPC

- G01R 1/06761: {related to layers}
- G01R 1/07314: {the body of the probe being perpendicular to test object, e.g. bed of nails or probe with bump contacts on a rigid support (on an elastic support, e.g. a film, G01R1/0735)}
- G01R 1/07357: {with flexible bodies, e.g. buckling beams}
- G01R 1/06722: {Spring-loaded}
- G01R: MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES (indicating correct tuning of resonant circuits H03J3/12)

## Abstract

A probe head includes a plate, a probe, and at least one composite coating layer. The plate has at least one through hole therein. The probe is at least partially disposed in the through hole of the plate. The composite coating layer includes a metal layer and a plurality of lubricating particles. The metal layer is disposed in the through hole of the plate and between the plate and the probe. The lubricating particles are dispersed in the metal layer.

## Claims

### Claim 1

A probe head, comprising:
a plate having at least one through hole therein;
a probe at least partially disposed in the through hole of the plate; and
at least one composite coating layer comprising:
a metal layer disposed in the through hole of the plate and between the plate and the probe; and
a plurality of lubricating particles dispersed in the metal layer.

### Claim 2 (depends on 1)

The probe head of claim 1, wherein the lubricating particles are made of Polytetrafluoroethene (PTFE).

### Claim 3 (depends on 1)

The probe head of claim 1, wherein the metal layer has an outer surface facing the probe and an inner surface opposite the outer surface, and the lubricating particles at the outer surface of the metal layer are denser than the lubricating particles at the inner surface of the metal layer.

### Claim 4 (depends on 1)

The probe head of claim 1, further comprising:
at least one base layer disposed between the metal layer and the plate.

### Claim 5 (depends on 4)

The probe head of claim 4, wherein the base layer and the metal layer are made of the same material.

### Claim 6 (depends on 4)

The probe head of claim 4, wherein an interface is formed between the base layer and the metal layer.

### Claim 7 (depends on 4)

The probe head of claim 4, further comprising:
a plurality of seeds disposed between the base layer and the plate.

### Claim 8 (depends on 1)

The probe head of claim 1, wherein the through hole is circle-shaped or square-shaped.

### Claim 9 (depends on 1)

The probe head of claim 1, wherein the plate is made of ceramic.

### Claim 10 (depends on 1)

The probe head of claim 1, wherein the plate is made of silicon.

### Claim 11 (depends on 10)

The probe head of claim 10, further comprising:
an insulating layer disposed between the metal layer and the plate.

### Claim 12 (depends on 10)

The probe head of claim 10, further comprising:
an insulating layer covering the entire surface of the plate.

### Claim 13 (depends on 1)

The probe head of claim 1, wherein the plate has opposite major surfaces, and the through hole is through the major surfaces; and
further comprising:
at least one bypass wire disposed on at least one of the major surfaces of the plate and electrically connected to the composite coating layer.

### Claim 14 (depends on 13)

The probe head of claim 13, wherein the bypass wire is electrically connected to at least two of the composite coating layers.

### Claim 15 (depends on 13)

The probe head of claim 13, wherein the bypass wire comprises at least one major portion electrically connected to at least two of the composite coating layers in series.

### Claim 16 (depends on 15)

The probe head of claim 15, wherein the bypass wire further comprises at least one minor portion electrically connected to the major portion in parallel.

### Claim 17 (depends on 16)

The probe head of claim 16, wherein the minor portion is longer than the major portion.

### Claim 18 (depends on 13)

The probe head of claim 13, further comprising:
a supporting board disposed opposite the plate, wherein the supporting board has at least one via hole therein, at least another portion of the probe is disposed in the via hole of the supporting board, the probe has a contact end for being in electrical contact with a device to be tested, and the contact end is closer to the plate than to the supporting board.

### Claim 19 (depends on 18)

The probe head of claim 18, wherein the bypass wire is disposed at least on the major surface of the plate distal to the supporting board.

### Claim 20 (depends on 18)

The probe head of claim 18, wherein the bypass wire is disposed at least on the major surface of the plate proximal to the supporting board.