# US 2014/0197712 A1 · Resonant transducer and manufacturing method of resonant transducer

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- Number: US 2014/0197712 A1
- Document ID: US20140197712A1
- Status: Published application
- Kind: A1
- Application number: 14/153,325
- Filed: 2014-01-13
- Published: 2014-07-17
- Earliest claimed: 2013-01-11
- Assignees: Yokogawa Electric Corporation
- Applicants: Yokogawa Electric Corporation
- Inventors: Takashi YOSHIDA; Shigeto IWAI; Yoshitaka SASAKI
- Web page: https://patentgrep.com/patent/US20140197712A1

## CPC

- H02N 11/00: Generators or motors not provided for elsewhere; Alleged perpetua mobilia obtained by electric or magnetic means (by hydrostatic pressure F03B17/04; {by mechanical means F03G7/10;} by dynamo-electric means, {including arrangements of permanent magnets interacting with other permanent magnets,} H02K53/00)
- H03H 3/0072: {of microelectro-mechanical resonators or networks (micromembranes or microbeams B81B2203/01; manufacture of microstructural devices in general B81C)}
- H03H 9/2463: {Clamped-clamped beam resonators}
- Y10T 29/49007: Indicating transducer
- H02N: ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H03H: IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS (waveguides, resonators, lines or other devices of the waveguide type H01P)
- Y10T: TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION

## Abstract

A resonant transducer includes a resonator, a resonator electrodes connected to an end part of the resonator, at least one fixed electrode arranged in the vicinity of the resonator, and a buried part formed between the fixed electrode and the resonator electrode. The resonator, the resonator electrodes and the fixed electrode are formed by the same active layer on a substrate.

## Claims

### Claim 1

A resonant transducer comprising:
a resonator;
a resonator electrode connected to an end part of the resonator;
a fixed electrode arranged in the vicinity of the resonator; and
a buried part formed between the fixed electrode and the resonator electrode,
wherein the resonator, the resonator electrode and the fixed electrode are formed by the same active layer on a substrate.

### Claim 2

A resonant transducer comprising:
a resonator;
a resonator electrode connected to an end part of the resonator;
a fixed electrode arranged in the vicinity of the resonator;
an outer peripheral electrode arranged in outer peripheries of the resonator electrode and the fixed electrode; and
a buried part formed between any of the electrodes,
wherein the resonator, the resonator electrode, the fixed electrode and outer peripheral electrode are formed by the same active layer on a substrate.

### Claim 3 (depends on 1)

The resonant transducer according to claim 1, wherein the buried part is made of polysilicon.

### Claim 4 (depends on 2)

The resonant transducer according to claim 2, wherein the buried part is made of polysilicon.

### Claim 5 (depends on 3)

The resonant transducer according to claim 3, wherein the buried part of the polysilicon is doped with impurities and connected to a reference potential.

### Claim 6 (depends on 4)

The resonant transducer according to claim 4, wherein the buried part of the polysilicon is doped with impurities and connected to a reference potential.

### Claim 7 (depends on 1)

The resonant transducer according to claim 1, wherein the buried part is made of a material which can withstand vapor of hydro-fluoric acid or hydrogen fluoride.

### Claim 8 (depends on 2)

The resonant transducer according to claim 2, wherein the buried part is made of a material which can withstand vapor of hydro-fluoric acid or hydrogen fluoride.

### Claim 9 (depends on 7)

The resonant transducer according to claim 7, wherein the material is any of SiC, SiGe or DLC.

### Claim 10 (depends on 8)

The resonant transducer according to claim 8, wherein the material is any of SiC, SiGe or DLC.

### Claim 11

A method of manufacturing a resonant transducer including a resonator, a resonator electrode connected to an end part of the resonator and a fixed electrode arranged in the vicinity of the resonator, which are formed by the same active layer on a substrate, the method comprising:
burying polysilicon in parts between the fixed electrode and the resonator electrode; and
etching a sacrifice layer to release the resonator.

### Claim 12

A method of manufacturing a resonant transducer including a resonator, a resonator electrode connected to end parts of the resonator, a fixed electrode arranged in the vicinity of the resonator and an outer peripheral electrode arranged in outer peripheries of the resonator electrode and the fixed electrode, which are formed by the same active layer on a substrate, the method comprising:
burying polysilicon in parts between any of the electrodes; and
etching a sacrifice layer to release the resonator.