# US 2014/0197610 A1 · Substrate gripping apparatus

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- Number: US 2014/0197610 A1
- Document ID: US20140197610A1
- Status: Published application
- Kind: A1
- Application number: 14/150,257
- Filed: 2014-01-08
- Published: 2014-07-17
- Earliest claimed: 2013-01-11
- Assignees: Ebara Corporation
- Applicants: Ebara Corporation
- Inventors: Mitsuru Miyazaki; Naoki Matsuda; Junji Kunisawa; Manao Hoshina
- Web page: https://patentgrep.com/patent/US20140197610A1

## CPC

- H10P 72/7608: {characterised by a plurality of separate clamping members, e.g. clamping fingers}
- H10P 72/7612: {characterised by lifting arrangements, e.g. lift pins}
- H10P 72/7624: {characterised by the mechanical construction of the susceptor, stage or support}
- Y10T 279/26: with centering means
- H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- Y10T: TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION

## Abstract

The present invention relates to a substrate gripping apparatus includes a base, a plurality of support posts which are vertically movable relative to the base, a lifting mechanism configured to lift the support posts, and a substrate holder and a substrate guide member mounted to each of the support posts. Each of the support posts includes a relative movement mechanism configured to move the substrate holder in such a direction that the substrate holder releases a peripheral portion of a substrate, while raising the substrate guide member relative to the substrate holder, when the support post moves upward, and to move the substrate holder in such a direction that the substrate holder grips the peripheral portion of the substrate, while lowering the substrate guide member relative to the substrate holder, when the support post moves downward.

## Claims

### Claim 1

A substrate gripping apparatus, comprising:
a base;
a plurality of support posts which are supported by the base and are vertically movable relative to the base;
a lifting mechanism configured to lift the support posts; and
a substrate holder and a substrate guide member mounted to each of the support posts,
each of the support posts including a relative movement mechanism configured to move the substrate holder and the substrate guide member relative to each other,
the relative movement mechanism being configured
to move the substrate holder in such a direction that the substrate holder releases a peripheral portion of a substrate, while raising the substrate guide member relative to the substrate holder, when the support post moves upward, and
to move the substrate holder in such a direction that the substrate holder grips the peripheral portion of the substrate, while lowering the substrate guide member relative to the substrate holder, when the support post moves downward.

### Claim 2 (depends on 1)

The substrate gripping apparatus according to claim 1, wherein the relative movement mechanism includes:
a first rod;
a second rod configured to be vertically movable relative to the first rod and to be lifted by the lifting mechanism;
a first spring arranged between the base and the first rod and configured to bias the first rod downward;
a second spring arranged between the first rod and the second rod and configured to bias the second rod downward;
a support shaft secured to the first rod and configured to rotatably support the substrate holder; and
a coupling mechanism configured to couple the second rod to the substrate holder.

### Claim 3 (depends on 2)

The substrate gripping apparatus according to claim 2, wherein the first spring has a spring constant which is lower than a spring constant of the second spring.

### Claim 4 (depends on 2)

The substrate gripping apparatus according to claim 2, wherein the first spring has a spring constant which is higher than a spring constant of the second spring.

### Claim 5 (depends on 2)

The substrate gripping apparatus according to claim 2, wherein the substrate guide member is secured to the second rod.

### Claim 6 (depends on 1)

The substrate gripping apparatus according to claim 1, wherein the relative movement mechanism is configured to raise the substrate guide member to a position higher than the substrate holder and lower the substrate guide member to a position lower than the substrate holder.

### Claim 7 (depends on 1)

The substrate gripping apparatus according to claim 1, wherein the substrate holders are arranged at equal intervals around a central axis of the base and are configured to perform centering of the substrate by gripping the peripheral portion of the substrate.

### Claim 8 (depends on 1)

The substrate gripping apparatus according to claim 1, wherein:
the substrate holder has a chuck portion configured to grip the peripheral portion of the substrate and a slope on which the peripheral portion of the substrate is to be placed; and
the chuck portion is formed integrally on the slope.

### Claim 9

A substrate gripping apparatus, comprising:
a base;
a plurality of support posts which are supported by the base and are vertically movable between a raised position and a lowered position relative to the base;
a substrate holder mounted to each of the support posts and to move according to a vertical motion of the support posts to grip a peripheral portion of the substrate when the support posts are in the lowered position and to release the peripheral portion of the substrate when the support posts are in the raised position; and
a substrate guide member mounted to each of the support posts and to move according to the vertical motion of the support posts to support the peripheral portion of the substrate when the support posts are in the raised position, the substrate guide member being lower than the substrate holder when the support posts are in the lowered position.