# US 2014/0197339 A1 · Lifting gate polydimethylsiloxane microvalves and pumps for microfluidic control

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- Number: US 2014/0197339 A1
- Document ID: US20140197339A1
- Status: Published application
- Kind: A1
- Application number: 14/155,183
- Filed: 2014-01-14
- Published: 2014-07-17
- Earliest claimed: 2013-01-15
- Assignees: The Regents of the University of California
- Applicants: The Regents of the University of California
- Inventors: Richard A. Mathies; Jungkyu Kim; Erik C. Jensen
- Web page: https://patentgrep.com/patent/US20140197339A1

## CPC

- F16K 99/0015: {Diaphragm or membrane valves}
- F04B 19/006: {Micropumps (F04B43/043 and F04B43/095 take precedence)}
- F16K 99/0005: {Lift valves}
- F16K 99/0059: {actuated by a pilot fluid}
- F16K 2099/008: {Multi-layer fabrications}
- F16K 2099/0094: {Micropumps}
- F16K: VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING {(devices for emptying and evacuating the excess liquid in valves or conduits F16L55/07)}
- F04B: POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS (machines for liquids, or pumps, of rotary-piston or oscillating-piston type F04C; non-positive-displacement pumps F04D; pumping of fluid by direct contact of another fluid or by using inertia of fluid to be pumped F04F)

## Abstract

The present disclosure relates to method, system for microfluidic control. One or more embodiments of the disclosure relate to pneumatically actuated “lifting gate” microvalves and pumps. In some embodiments, a microfluidic control module is provided, which comprises a plurality of pneumatic channels and a plurality of lifting gate valves configured to be detachably affixed to a substrate. The plurality of lifting gate valves are aligned with at least one fluidic channel on the substrate when affixed to the substrate. Each of the valves comprises: a pneumatic layer, a fluidic layer, and a pneumatic displacement chamber between the pneumatic layer and the fluidic layer. The fluidic layer has a first side facing the pneumatic layer and a second side facing away from the pneumatic layer, wherein the second side has a protruding gate configured to obstruct a flow of the fluidic channel when the fluidic layer is at a resting state.

## Claims

### Claim 1

A microfluidic control module comprising:
a plurality of pneumatic channels, each channel configured to deliver positive and/or negative pressure to a pneumatic displacement chamber; and
a plurality of lifting gate valves configured to be detachably affixed to a substrate, the valves being aligned with at least one fluidic channel on the substrate when affixed to the substrate, wherein each of the valves comprises:
a pneumatic layer,
a fluidic layer having a first side facing the pneumatic layer and a second side facing away from the pneumatic layer, wherein the second side has a protruding gate configured to obstruct a flow of the fluidic channel when the valves are attached to the substrate and the fluidic layer is at a resting state, and
a pneumatic displacement chamber between the pneumatic layer and the fluidic layer, wherein the pneumatic displacement chamber is configured to use a negative opening pressure delivered by one of the pneumatic channels to actuate the fluidic layer, thereby lifting the protruding gate away from the substrate to allow the flow of the fluidic channel.

### Claim 2 (depends on 1)

The microfluidic control module as in claim 1, wherein the pneumatic displacement chamber is configured to use a positive closing pressure delivered by the pneumatic channel to return or maintain the fluidic layer to or at a resting state, thereby closing the protruding gate to obstruct the flow of the fluidic channel.

### Claim 3 (depends on 2)

The microfluidic control module as in claim 2, wherein break-through pressures of the fluidic channel increase linearly up to 65 kPa as the positive closing pressure increases.

### Claim 4 (depends on 1)

The microfluidic control module as in claim 1, wherein the pneumatic layer further comprises one or more pneumatic ports through which one or more pneumatic channels deliver pressure to the pneumatic displacement chamber.

### Claim 5 (depends on 1)

The microfluidic control module as in claim 1, the module comprising:
a bottom layer of valves as the plurality of lifting gate valves of claim 1; and
one or more additional layers of valves that are stacked over the bottom layer of valves, thereby forming a multilayer microfluidic control module.

### Claim 6 (depends on 5)

The multilayer microfluidic control module as in claim 5, wherein the fluidic layer of a valve in the additional layers of valves is configured to be affixed to the pneumatic layer of another valve positioned immediately thereunder.

### Claim 7 (depends on 6)

The multilayer microfluidic control module as in claim 6, wherein the pneumatic layer of the other valve positioned immediately thereunder comprises a fluidic channel.

### Claim 8 (depends on 1)

The microfluidic control module as in claim 1, wherein the pneumatic layer is made of PDMS.

### Claim 9 (depends on 1)

The microfluidic control module as in claim 1, wherein the fluidic layer is made of PDMS.

### Claim 10 (depends on 1)

The microfluidic control module as in claim 1, wherein the substrate is made of materials selected from the group comprising: glass, plastic, silicon, polyester terephthalate, metal, or combinations thereof.

### Claim 11 (depends on 1)

The microfluidic control module as in claim 1 configured as one or more pumps, wherein each pump comprises three or more lifting gate valves in series comprising an input valve, a displacement valve, and an outlet valve, wherein each lifting gate valve is actuated by a different pneumatic channel and the three lifting gate valves are independently actuated in sequence designed to move fluid through the pump.

### Claim 12 (depends on 11)

The microfluidic control module as in claim 11 wherein one or more of the pumps is used to form a multi-directional fluidic router, said router comprising one central displacement valve in fluid communication with one or more input valves and one or more outlet valves.

### Claim 13 (depends on 11)

The microfluidic control module as in claim 11 configured as a mixer, wherein the input valves and output valves of the pump are each connected to admission channels to form a mixer wherein mixing is accomplished by actuating the three or more valves in a sequence to pump the fluid in a loop or back and forth.

### Claim 14 (depends on 1)

The microfluidic control module as in claim 1 wherein actuating the fluidic layer forms a fluid reservoir in the fluidic channel.

### Claim 15 (depends on 14)

The microfluidic control module as in claim 14 configured as a mixer, wherein the input valves and output valves of the pump are each connected to admission channels to form a mixer wherein mixing is accomplished by moving a fluid between two reservoirs.

### Claim 16 (depends on 14)

The microfluidic control module as in claim 14, wherein reservoirs in each of a plurality of the fluidic channels are connected by a fluidic bus.

### Claim 17 (depends on 14)

The microfluidic control module as in claim 14, wherein the reservoir has one or more inputs and is operable as a reactor.

### Claim 18 (depends on 1)

The microfluidic control module as in claim 1, wherein one pneumatic channel actuates a plurality of valves that control fluid flow in a plurality of different fluidic channels.

### Claim 19 (depends on 1)

The microfluidic control module as in claim 1, wherein the module has at least 60% pumping efficiency from flow rate measurements.

### Claim 20

The microfluidic control module as in claims above, wherein the module has at least 80% pumping efficiency from flow rate measurements.
