# US 2014/0197331 A1 · Charged particle device > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2014/0197331 A1 - Document ID: US20140197331A1 - Status: Published application - Kind: A1 - Application number: 14/232,816 - Filed: 2012-05-31 - Published: 2014-07-17 - Earliest claimed: 2011-07-25 - Assignees: Hitachi High-Technologies Corporation - Inventors: Hirohisa Enomoto; Wataru Suzuki; Shinya Kitayama - Web page: https://patentgrep.com/patent/US20140197331A1 ## CPC - H01J 37/16: Vessels; Containers - H01J 37/09: Diaphragms; Shields associated with electron or ion-optical arrangements; Compensation of disturbing fields - H01J 37/20: Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support - H01J 2237/0216: Means for avoiding or correcting vibration effects - H01J 2237/26: Electron or ion microscopes - H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H) ## Abstract A charged particle device includes a cylindrical column (102), a charged particle beam optical system disposed in the column; a sample stage (103) disposed on the column, and a support device (211, 212) supporting the column. The support device includes a simply supported structure that simply supports the column at a plurality of support points set along an axial line direction of the column. The support points for the column are disposed at positions corresponding to the positions of nodes of vibration of the column. In this way, the rigidity of the column can be increased without increasing the weight of the column itself, whereby vibrations acting on the column can be decreased. ## Claims ### Claim 1 A charged particle device comprising: a cylindrical column; a charged particle beam optical system disposed in the column; a sample stage disposed on the column; and a support device supporting the column, wherein: the support device includes a simply supported structure simply supporting the column at a plurality of support points set along an axial line direction of the column; and the support points for the column are disposed at positions corresponding to the positions of nodes of vibration of a beam having free ends at both ends, the column being considered as the beam. ### Claim 2 (depends on 1) The charged particle device according to claim 1, wherein, when the positions of two nodes in the case of a first order mode of vibration of the beam are successive points P1 and P2, the support points for the column are disposed at positions corresponding to the points P1 and P2. ### Claim 3 (depends on 1) The charged particle device according to claim 1, wherein, when the positions of two nodes in the case of a first order mode of vibration of the beam are successive points P1 and P2, and the positions of three nodes in the case of a second order mode of vibration are successive points Q1, Q2, and Q3, the support points for the column are disposed at a first support point between the points P1 and Q1, and at a second support point between the points P2 and Q3. ### Claim 4 (depends on 1) The charged particle device according to claim 1, comprising projections on an outer periphery of the column at positions corresponding to the support points, wherein: the support device includes four columnar members disposed on a floor, and a support member connecting the columnar members; and the projections of the column are supported by the support member. ### Claim 5 (depends on 4) The charged particle device according to claim 4, comprising an anti-vibration mount between the projections of the column and the support member for supporting the column in a vibration-damping manner. ### Claim 6 (depends on 4) The charged particle device according to claim 4, wherein the support member includes a frame member having an opening penetrated by the column. ### Claim 7 (depends on 1) The charged particle device according to claim 1, wherein the support device is covered with a cover. ### Claim 8 (depends on 1) The charged particle device according to claim 1, wherein: the simply supported structure includes a pin disposed on the column, and a support mount rotatable about the pin; and the support mount is fixed on the support device. ### Claim 9 (depends on 1) The charged particle device according to claim 1, wherein the simply supported structure includes a roller support structure including a pin disposed on the column, a support mount rotatable about the pin, and a roller disposed between a lower end portion of the support mount and the support device. ### Claim 10 A charged particle device comprising: a cylindrical column; a charged particle beam optical system disposed in the column; and a sample stage disposed on the column; and a support device supporting the column, wherein: the support device includes a simply supported structure simply supporting the column at a plurality of support points set along an axial line direction of the column; and the support points for the column are disposed at positions corresponding to the positions of nodes of vibration of a beam simply supported at both ends, the column being considered as the beam. ### Claim 11 (depends on 10) The charged particle device according to claim 10, comprising projections on an outer periphery of the column at positions corresponding to the support points, wherein: the support device includes four columnar members disposed on a floor, and a support member connecting the columnar members; and the projections of the column are supported by the support member. ### Claim 12 (depends on 11) The charged particle device according to claim 11, comprising an anti-vibration mount disposed between the projections of the column and the support member for supporting the column in a vibration-damping manner. ### Claim 13 (depends on 10) The charged particle device according to claim 10, wherein the support device is covered with a cover. ### Claim 14 (depends on 10) The charged particle device according to claim 10, wherein: the simply supported structure includes a pin disposed on the column and a support mount rotatable about the pin; and the support mount is fixed on the support device. ### Claim 15 (depends on 10) The charged particle device according to claim 10, wherein the simply supported structure includes a roller support structure having a pin disposed on the column, a support mount rotatable about the pin, and a roller disposed between a lower end portion of the support mount and the support device. ### Claim 16 A charged particle device comprising: a cylindrical column; a charged particle beam optical system disposed in the column; a sample stage disposed on the column; and a support device supporting the column, wherein: the support device includes a simply supported structure simply supporting the column at a plurality of support points set along an axial line direction of the column; the support points for the column are disposed at positions corresponding to the positions of nodes of vibration of a beam having free ends at both ends, the column being considered as the beam; projections are disposed on an outer periphery of the column at positions corresponding to the support points; and the column is supported by the support device via the projections of the column. ### Claim 17 (depends on 16) The charged particle device according to claim 16, wherein the support device includes four columnar members disposed on a floor, and a support member connecting the columnar members and supporting the projections of the column, the charged particle device further comprising an anti-vibration mount disposed between the projections of the column and the support member for supporting the column in a vibration-damping manner. ### Claim 18 (depends on 16) The charged particle device according to claim 16, wherein: the simply supported structure includes a pin disposed on the projections on the column, and a support mount rotatable about the pin; and the support mount is fixed on the support device. ### Claim 19 (depends on 16) The charged particle device according to claim 16, wherein: the simply supported structure includes a roller support structure having a pin disposed on the projections of the column, a support mount rotatable about the pin, and a roller disposed between a lower end portion of the support mount and the support device. ### Claim 20 (depends on 16) The charged particle device according to claim 16, wherein the support device is covered with a cover.