# US 2014/0197327 A1 · High-voltage insulation device for charged-particle optical apparatus > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2014/0197327 A1 - Document ID: US20140197327A1 - Status: Published application - Kind: A1 - Application number: 14/155,771 - Filed: 2014-01-15 - Published: 2014-07-17 - Earliest claimed: 2013-01-17 - Assignees: IMS Nanofabrication GmbH - Applicants: Ims Nanofabrication AG - Inventors: Elmar Platzgummer; Andreas Chylik; Gerald Kratzert; Roman Oberleitner - Web page: https://patentgrep.com/patent/US20140197327A1 ## CPC - H01B 17/14: Supporting insulators (pin insulators H01B17/20; apertured insulators H01B17/24) - B82Y 10/00: Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic - B82Y 40/00: Manufacture or treatment of nanostructures - H01J 37/023: {Means for mechanically adjusting components not otherwise provided for} - H01J 37/04: Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement {(H01J37/32009, H01J37/32623, H01J37/3266, H01J37/32697 take precedence; electron or ion-optical systems for localised treatment of objects H01J37/3007)} - H01J 37/147: Arrangements for directing or deflecting the discharge along a desired path ({H01J37/045 take precedence;} lenses H01J37/10) - H01J 37/15: External mechanical adjustment of electron or ion optical components (H01J37/067, H01J37/20 take precedence) - H01J 37/3177: {Multi-beam, e.g. fly's eye, comb probe} - H01J 2237/036: Spacing - H01J 2237/038: Insulating - H01J 2237/1502: Mechanical adjustments - H01B: CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES (selection for magnetic properties H01F1/00; waveguides H01P {; printed circuits H05K}) - B82Y: SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES - H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H) ## Abstract A high-voltage insulation device (300) for use in a charged-particle optical apparatus comprises a plurality of rigid pillars (320) made of electrically insulating material. These pillars (320) are arranged around a central passage (310) which traverses the insulating device along its longitudinal axis (L), and the two ends of each pillar are configured to be respectively fixed to two separate electrostatic housings (221, 231) of the charged-particle optical apparatus by means of two respective end plates (311, 312), with the pillars (320) being oriented at an angle so as to be inclined with regard to said longitudinal axis (L). Advantageously, the pillars are mechanically adjustable with regard to their effective length, and each pillar (320) is arranged outside the central passage with its two ends at either of the first and second end plates (311,312), preferably in a zig-zag arrangement. ## Claims ### Claim 1 A high-voltage insulation device for use in a charged-particle optical apparatus, comprising: a plurality of rigid pillars made of electrically insulating material, wherein said pillars are arranged around a central passage which traverses the insulation device along a longitudinal axis thereof, each pillar having two ends which are configured to be respectively fixed to two separate electrostatic housings of a charged-particle optical apparatus, and wherein said pillars are oriented at an inclined angle with regard to said longitudinal axis. ### Claim 2 (depends on 1) The high-voltage insulation device of claim 1, wherein the pillars are provided with adjustment means allowing mechanical adjustment of an effective length of the pillars. ### Claim 3 (depends on 1) The high-voltage insulation device of claim 1, wherein the pillars are arranged around the longitudinal axis and in a configuration of alternating angles of tilt with regard to the longitudinal axis. ### Claim 4 (depends on 1) The high-voltage insulation device of claim 1, configured to be positioned within a high-vacuum space dedicated to an electro-optical column oriented along the central opening of the high-voltage insulation device. ### Claim 5 (depends on 1) The high-voltage insulation device of claim 1, further comprising a vacuum housing of generally tubular shape and surrounding the pillars and the central passage, the vacuum housing comprising a length-adjustable segment. ### Claim 6 (depends on 5) The high-voltage insulation device of claim 5, wherein the length-adjustable segment is a bellows segment. ### Claim 7 (depends on 1) The high-voltage insulation device of claim 1, wherein each pillar is oriented to the longitudinal axis in a skew line arrangement at an angle of tilt, with the ends of each pillar located at a greater distance to the longitudinal axis than a central portion of the pillar. ### Claim 8 (depends on 1) The high-voltage insulation device of claim 1, wherein at least one end of each pillar is provided with an adjustable jack for adjusting a length of the respective pillar and with a joint allowing for a correction of an angle of tilt of the pillar with respect to the longitudinal axis. ### Claim 9 (depends on 1) The high-voltage insulation device of claim 1, wherein the pillars are arranged around the central passage at regular angular intervals and the number of the pillars is even. ### Claim 10 (depends on 9) The high-voltage insulation device of claim 9, wherein the pillars are arranged in pairs. ### Claim 11 (depends on 1) The high-voltage insulation device of claim 1, wherein the pillars are made of one piece. ### Claim 12 (depends on 1) The high-voltage insulation device of claim 1, further comprising a first end plate and a second end plate, the first and second end plates each having a central opening, the central passage running between the central openings of the first and second end plates wherein each pillar is arranged outside the central passage and is fixed at a first end thereof at the first end plate and at a second end thereof at the second end plate. ### Claim 13 (depends on 12) The high-voltage insulation device of claim 12, further comprising magnetic connection elements comprising a material of high magnetic susceptibility, said elements being arranged between the first and second end plates for obtaining a magnetic connection therebetween. ### Claim 14 (depends on 12) The high-voltage insulation device of claim 12, wherein the first and second end plates are realized as planar plates oriented parallel to each other and having the same overall circular cylindrical shape around the longitudinal axis, the respective central openings being circular and centered around the longitudinal axis. ### Claim 15 A charged-particle optical apparatus, comprising: an electro-optical column and at least two electrostatic housings, said electrostatic housings surrounding respective sections of the electro-optical column and configured for being applied different electrostatic potentials; a high-voltage insulation device, itself comprising: a first end plate and a second end plate, each having a central opening, wherein the central openings define a central passageway; a plurality of rigid pillars made of electrically insulating material, wherein said pillars are arranged around the central passage which traverses the insulation device along a longitudinal axis thereof, each pillar having two ends which are configured to be respectively fixed to two separate electrostatic housings of a charged-particle optical apparatus, and wherein said pillars are oriented at an inclined angle with regard to said longitudinal axis; wherein said high-voltage insulation device connects one of the electrostatic housings with the other of the electrostatic housings, wherein said electrostatic housings comprise openings configured to be combined with the central openings of the high-voltage insulation device so as to form a channel for the electro-optical column. ### Claim 16 (depends on 15) The apparatus of claim 15, wherein the electro-optical column is contained within a high-vacuum space, the pillars being positioned within said high-vacuum space. ### Claim 17 (depends on 15) The apparatus of claim 15, comprising a vacuum casing connecting the first and second end plates and surrounding the plurality of pillars, said vacuum casing comprising a vacuum-tight insulating ring of tubular shape arranged between the first and second end plates.