# US 2014/0197325 A1 · Charged particle beam lens and exposure apparatus using the same

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- Number: US 2014/0197325 A1
- Document ID: US20140197325A1
- Status: Published application
- Kind: A1
- Application number: 14/005,078
- Filed: 2012-03-14
- Published: 2014-07-17
- Earliest claimed: 2011-03-15
- Assignees: Canon Kabushiki Kaisha
- Inventors: Takahisa Kato; Yutaka Setomoto
- Web page: https://patentgrep.com/patent/US20140197325A1

## CPC

- H01J 37/12: electrostatic
- B82Y 10/00: Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
- B82Y 40/00: Manufacture or treatment of nanostructures
- H01J 3/18: Electrostatic lenses
- H01J 37/3177: {Multi-beam, e.g. fly's eye, comb probe}
- H01J 2237/04924: electrostatic
- H01J 2237/1205: Microlenses
- H01J 2237/1207: Einzel lenses
- H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H)
- B82Y: SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES

## Abstract

An electrostatic charged particle beam lens includes an electrode including a flat plate having a first surface having a normal line extending in a direction of an optical axis and a second surface opposite to the first surface, the electrode having a through-hole extending from the first surface to the second surface. When an opening cross section is defined as a cross section of the through-hole taken along a plane perpendicular to the normal line and a representative diameter is defined as a diameter of a circle obtained by performing regression analysis of the opening cross section, a representative diameter of the opening cross section in a first region that is on the first surface side and a representative diameter of the opening cross section in a second region that is on the second surface side are each larger than a representative diameter of the opening cross section in a third region that is a region in the electrode disposed between the first surface and the second surface.

## Claims

### Claim 1

An electrostatic charged particle beam lens comprising:
an electrode including a flat plate having a first surface having a normal line extending in a direction of an optical axis and a second surface opposite to the first surface, the electrode having a through-hole extending from the first surface to the second surface,
wherein, when an opening cross section is defined as a cross section of the through-hole taken along a plane perpendicular to the normal line and a representative diameter is defined as a diameter of a circle obtained by performing regression analysis of the opening cross section, a representative diameter of the opening cross section in a first region that is on the first surface side and a representative diameter of the opening cross section in a second region that is on the second surface side are each larger than a representative diameter of the opening cross section in a third region that is a region in the electrode disposed between the first surface and the second surface,
wherein, when an incircle and a circumcircle are respectively defined as two concentric circles having a smaller radius and a larger radius between which the opening cross section is disposed and having the smallest difference in the radii, a difference in the radii of the incircle and the circumcircle of the opening cross section in the first region and a difference in the radii of the incircle and the circumcircle of the opening cross section in the second region are each larger than a difference in the radii of the incircle and the circumcircle of the opening cross section in the third region, and
wherein the representative diameter in the first region and the representative diameter in the third region are different from each other at an interface between the first region and the third region, and the representative diameter in the second region and the representative diameter in the third region are different from each other at an interface between the second region and the third region.

### Claim 2

(canceled)

### Claim 3 (depends on 1)

The charged particle beam lens according to claim 1, wherein a thickness of each of the first region and the second region is smaller than a thickness of the third region.

### Claim 4 (depends on 1)

The charged particle beam lens according to claim 1, wherein a thickness of the first region is smaller than ⅛ of the representative diameter in the third region and a thickness of the second region is smaller than ⅛ of the representative diameter in the third region.

### Claim 5 (depends on 1)

The charged particle beam lens according to claim 1, wherein at least one of the first region and the second region is stacked on or bonded to the third region.

### Claim 6

(canceled)

### Claim 7 (depends on 1)

The charged particle beam lens according to claim 1, wherein the electrode is covered by an electroconductive film.

### Claim 8 (depends on 1)

The charged particle beam lens according to claim 1, wherein the electrode has a plurality of openings.

### Claim 9 (depends on 1)

An exposure apparatus comprising the charged particle beam lens according to claim 1 and using a charged particle beam.

### Claim 10 (depends on 9)

The exposure apparatus according to claim 9 using a plurality of charged particle beams.