# US 2014/0197322 A1 · Multi-spot collection optics

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- Number: US 2014/0197322 A1
- Document ID: US20140197322A1
- Status: Published application
- Kind: A1
- Application number: 14/115,326
- Filed: 2012-05-02
- Published: 2014-07-17
- Earliest claimed: 2011-05-03
- Assignees: Applied Materials Israel Ltd.
- Applicants: Applied Materials Israel Ltd.
- Inventors: Haim Eder; Nissim Elmaliach; Igor Krayvitz (Krivts); Mario Mützel
- Web page: https://patentgrep.com/patent/US20140197322A1

## CPC

- G01T 1/2002: {Optical details, e.g. reflecting or diffusing layers}
- G01J 1/0425: {using optical fibers}
- G01N 21/62: Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- H01J 37/244: Detectors; Associated components or circuits therefor
- H01J 37/28: with scanning beams {(H01J37/268, H01J37/292, H01J37/2955 take precedence)}
- G01N 21/253: {for batch operation, i.e. multisample apparatus (analytical automats G01N35/00)}
- G01N 21/6452: {Individual samples arranged in a regular 2D-array, e.g. multiwell plates}
- G01N 2201/0833: Fibre array at detector, resolving
- H01J 2237/2445: Photon detectors for X-rays, light, e.g. photomultipliers
- H01J 2237/2446: Position sensitive detectors
- G01T: MEASUREMENT OF NUCLEAR OR X-RADIATION (radiation analysis of materials, mass spectrometry G01N23/00; tubes for determining the presence, intensity, density or energy of radiation or particles H01J47/00)
- G01J: MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY (light sources F21, H01J, H01K, H05B; investigating properties of materials by optical means G01N)
- G01N: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES (measuring or testing apparatus or processes other than immunoassay, involving enzymes or microorganisms C12M, C12Q)
- H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H)

## Abstract

Apparatus for detecting optical radiation emitted from an array of spots on an object. The apparatus includes a plurality of light guides having respective input ends and output ends, with the input ends ordered in a geometrical arrangement corresponding to the array of the spots. Relay optics collect and focus the optical radiation from the object onto the input ends such that each input end receives the optical radiation from a corresponding one of the spots. Multiple detectors and each coupled to receive the optical radiation from an output end of a respective one of the light guides.

## Claims

### Claim 1

An apparatus for detecting optical radiation emitted from an array of spots on an object, the apparatus comprising:
a plurality of light guides having respective input ends and output ends, with the input ends ordered in a geometrical arrangement corresponding to the array of the spots;
relay optics, configured to collect and focus the optical radiation from the array of spots on the object onto the input ends such that each input end receives the optical radiation from a corresponding one of the spots; and
multiple detectors, each detector coupled to receive the optical radiation from a respective output end of a respective one of the light guides.

### Claim 2 (depends on 1)

The apparatus according to claim 1, wherein the geometrical arrangement comprises a hexagonal grid.

### Claim 3 (depends on 1)

The apparatus according to claim 1, wherein the light guides comprise optical fibers.

### Claim 4 (depends on 3)

The apparatus according to claim 3, wherein the input ends are closely packed together to form a fiber bundle in the geometrical arrangement.

### Claim 5 (depends on 1)

The apparatus according to claim 1, wherein the relay optics comprise a microlens array having multiple microlenses disposed in the geometrical arrangement of the light guides so that each microlens focuses the optical radiation onto a respectve input end of a corresponding one of the light guides.

### Claim 6 (depends on 1)

The apparatus according to claim 1, wherein the relay optics comprise a zoom lens, having a magnification that is variable so as to adjust for variations in a spacing of the array of the spots.

### Claim 7 (depends on 1)

The apparatus according to claim 1, wherein the geometrical arrangement of the input ends is rotatable so as to adjust for rotation of the array of the spots.

### Claim 8 (depends on 1)

The apparatus according to claim 1, further comprising an alignment unit configured to form an image of the array of the spots on the object superimposed with optical radiation transmitted through at least some of the light guides from respective output ends of each of the light guides to respective input ends of the light guides and projected onto the object through the relay optics.

### Claim 9 (depends on 1)

The apparatus according to claim 1, further comprising an alignment unit, which comprises:
a fiber bundle integrated with the light guides, the fiber bundle, comprising one or more optical fibers, having an input end arranged to receive the optical radiation from one of the spots and having an output end;
an alignment detector, which is coupled to receive the optical radiation emitted from the output end of the fiber bundle and to generate signals indicative of an alignment of the fiber bundle with the one of the spots; and
a controller, which is configured to adjust the relay optics responsively to the signals.

### Claim 10 (depends on 9)

The apparatus according to claim 9, wherein the alignment detector comprises multiple detector elements, which output respective signals, and wherein the fiber bundle comprises multiple optical fibers, which are arranged so that a deviation in the alignment of the fiber bundle with the one of the spots causes changes in the respective signals that are indicative of the deviation.

### Claim 11 (depends on 9)

The apparatus according to claim 9, wherein the alignment unit comprises multiple fiber bundles and multiple alignment detectors, each coupled to receive the optical radiation from a respective one of the fiber bundles and to provide the signals to the controller.

### Claim 12 (depends on 1)

The apparatus according to claim 1, wherein the object comprises a scintillator, which is configured to emit the optical radiation from the spots in response to corresponding beams of secondary electrons that are emitted from respective locations on a sample and focused onto the scintillator.

### Claim 13 (depends on 12)

The apparatus according to claim 12, further comprising an electron source, which is configured to direct multiple beams of primary electrons toward the respective locations on the sample so as to cause the sample to emit the secondary electrons.

### Claim 14

A method for detecting optical radiation emitted from an array of spots on an object, the method comprising:
collecting and focusing the optical radiation from the array of spots on the object input ends of a plurality of light guides, the input ends being ordered in a geometrical arrangement corresponding to the array of the spots, so that each input end receives the optical radiation from a corresponding one of the spots; and
detecting the optical radiation transmitted through the light guides using a respective detector coupled to a respective output end of each of the light guides.

### Claim 15 (depends on 14)

The method according to claim 14, wherein focusing the optical radiation comprises directing the collected optical radiation through a microlens array, which comprises multiple microlenses disposed in the geometrical arrangement of the input ends of the light guides, so that each microlens focuses the optical radiation onto a respective input end of a corresponding one of the light guides.

### Claim 16 (depends on 14)

The method according to claim 14, wherein focusing the optical radiation comprises applying a zoom lens, having a magnification that is variable, to the optical radiation so as to adjust for variations in a spacing of the array of the spots.

### Claim 17 (depends on 14)

The method according to claim 14, further comprising arranging the plurality of the light guides by rotating the geometrical arrangement of the input ends so as to adjust for rotation of the array of the spots.

### Claim 18 (depends on 14)

The method according to claim 14, further comprising aligning the light guides by forming an image of the array of the spots on the object superimposed with optical radiation transmitted through at least some of the light guides from the respective output ends to the respective input ends and projected onto the object through the relay optics.

### Claim 19 (depends on 14)

The method according to claim 14, further comprising aligning the light guides by:
arranging an input end of a fiber bundle, which comprises one or more optical fibers and is integrated with the light guides, to receive the optical radiation from one of the spots;
directing the optical radiation from an output end of the fiber bundle onto an alignment detector, which generates signals indicative of an alignment of the fiber bundle with the one of the spots; and
adjusting the relay optics responsively to the signals.

### Claim 20 (depends on 19)

The method according to claim 19, wherein arranging the input end of the fiber bundle comprises arranging multiple fiber bundles, which direct the optical radiation onto multiple respective alignment detectors, and wherein the relay optics are adjusted responsively to the signals from the at least three respective alignment detectors.