# US 2014/0197313 A1 · Charged-particle microscope

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- Number: US 2014/0197313 A1
- Document ID: US20140197313A1
- Status: Published application
- Kind: A1
- Application number: 14/215,209
- Filed: 2014-03-17
- Published: 2014-07-17
- Earliest claimed: 2009-08-03
- Assignees: Hitachi High-Technologies Corporation
- Applicants: Hitachi High-Technologies Corporation
- Inventors: Noritsugu TAKAHASHI; Muneyuki FUKUDA; Manabu YANO; Hirohiko KITSUKI; Kazunari ASAO; Tomoyasu SHOJO
- Web page: https://patentgrep.com/patent/US20140197313A1

## CPC

- H01J 37/28: with scanning beams {(H01J37/268, H01J37/292, H01J37/2955 take precedence)}
- H01J 37/10: Lenses
- H01J 37/145: Combinations of electrostatic and magnetic lenses
- H01J 37/21: Means for adjusting the focus
- H01J 2237/2817: Pattern inspection
- H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H)

## Abstract

A charged-particle-beam device is characterized in having a control value for an aligner coil (29) being determined by: a coil current and an electrode applied-voltage at a control value for objectives (30, 31), which is an electromagnetic-field superposition lens; a control value for image-shift coils (27, 28); and the acceleration voltage of the charged-particle-beam. By doing this, it has become possible to avoid image disturbances that occur on images to be displayed at boundaries between charged areas and non-charged areas, and provide a charged-particle-beam device that obtains clear images without any unevenness in brightness.

## Claims

### Claim 1

A charged particle microscope, comprising:
a stage holding a sample to be measured;
a charged particle optical tube that detects a secondary signal generated by two-dimensional scanning a charged particle beam onto the sample and having an objective lens that focuses the charged particle beam onto the sample and a height measuring device that measures a height of the sample; and
a controller controlling the objectice lens,
wherein the objective lens is configured by a plurality of lenses including an electromagnetic lens and an electrostatic lens,
wherein the controller calculates a set value of the electromagnetic lens based on an average height of the sample before the stage starts moving the sample to a target observation position for the first time, and
wherein the controller calculates a set value of the electrostatic lens based on a height of the sample at a stop position of the stage after the stage starts moving the sample to the target observation position.

### Claim 2 (depends on 1)

The charged particle microscope according to claim 1,
wherein the average height of the sample is an average value obtained by measuring representative positions of the sample using the height measuring device.

### Claim 3 (depends on 1)

The charged particle microscope according to claim 1,
wherein the set value of the electromagnetic lens is calculated from an acceleration voltage of the charged particle beam and the average height of the sample, and
wherein the set value of the electrostatic lens is calculated from the acceleration voltage of the charged particle beam, a median value of the height of the sample and the height of the sample after the stage is stopped.

### Claim 4 (depends on 1)

The charged particle microscope according to claim 1,
wherein the controller further calculates an error between the target observation position and the stop position.

### Claim 5 (depends on 1)

The charged particle microscope according to claim 1, further comprising:
a deflector that sets a center of the scanning to a desired position in a scanning area on the sample; and
an optical axis adjuster that reduces off axis aberrations of the objective lens occurring when the charged particle beam is set in the center of the scanning area.

### Claim 6 (depends on 5)

The charged particle microscope according to claim 5,
wherein the deflector is configured by an image shift deflector.

### Claim 7 (depends on 5)

The charged particle microscope according to claim 5,
wherein the deflector is configured by an image shift deflector and a scanning deflector.