# US 2014/0197311 A1 · Sample Carrier for an Electron Microscope

> Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt

- Number: US 2014/0197311 A1
- Document ID: US20140197311A1
- Status: Published application
- Kind: A1
- Application number: 14/154,753
- Filed: 2014-01-14
- Published: 2014-07-17
- Earliest claimed: 2013-01-15
- Assignees: FEI Company
- Applicants: FEI Company
- Inventors: Frank Nederlof
- Web page: https://patentgrep.com/patent/US20140197311A1

## CPC

- H01J 37/20: Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
- G01N 23/2204: Specimen supports therefor; Sample conveying means therefore
- G01N 23/2251: using incident electron beams, e.g. scanning electron microscopy [SEM]
- H01J 2237/201: for mounting multiple objects
- H01J 2237/26: Electron or ion microscopes
- H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H)
- G01N: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES (measuring or testing apparatus or processes other than immunoassay, involving enzymes or microorganisms C12M, C12Q)

## Abstract

The invention relates to a sample carrier for a transmission electron microscope. When using state of the art sample carriers, such as half-moon grids in combination with detectors detecting, for example, X rays emitted at a large emittance angle, shadowing is a problem. Similar problems occur when performing tomography, in which the sample is rotated over a large angle. The invention provides a solution to shadowing by forming the parts of the grid bordering the interface between sample and grid as tapering parts.

## Claims

### Claim 1

A sample carrier for carrying a sample in an electron microscope, the sample carrier comprising a metal foil, the sample carrier comprising at least one mounting position bordering a lateral side of the metal foil for attaching a sample thereto, wherein the mounting position borders a part of the sample carrier in which the thickness of the metal foil is reduced.

### Claim 2 (depends on 1)

The sample carrier of claim 1 in which the reduced thickness of the metal foil is achieved by a tapering part of the foil.

### Claim 3 (depends on 1)

The sample carrier of claim 1 in which the metal foil has a thickness of at least 20 μm and the part with a reduced thickness has a thickness of at most 10 μm.

### Claim 4 (depends on 1)

The sample carrier of any claim 1 in which the metal is Mo, Ti, Be or Cu.

### Claim 5 (depends on 2)

The sample carrier of claim 2 in which the tapering part shows a taper angle with respect to the flat of the sample carrier of less than 45 degrees, more specifically less than 30 degrees, most specifically less than 20 degrees.

### Claim 6 (depends on 2)

The sample carrier of claim 2 in which the tapering part is formed by laser ablation of the metal.

### Claim 7 (depends on 1)

The sample carrier of claim 1 in which the sample carrier has a uniform consistency.

### Claim 8 (depends on 1)

The sample carrier claim 1 in which the sample carrier comprises a carbon foil extending beyond the boundaries of the metal foil.

### Claim 9 (depends on 1)

A method of preparing a sample for inspection in an electron microscope, the method comprising:
in an evacuated sample chamber of an apparatus equipped with a Focused Ion Beam column excavate a sample from a work piece and weld the sample to a sample carrier,
while keeping the sample in the evacuated sample chamber of the apparatus thin the sample to form a lamella, and
inspect the thus formed lamella with an electron beam,
wherein:
the sample carrier is a sample carrier according to claim 1,
from the moment that the sample is excavated from the work piece until at least the moment that the sample is thinned to a lamella the sample is kept in the evacuated chamber of the apparatus.

### Claim 10 (depends on 9)

The method of claim 9 in which the inspection with an electron beam comprises acquiring a tomogram.

### Claim 11 (depends on 9)

The method of claim 9 in which inspection with an electron beam comprises detecting transmitted electrons and/or detecting X-rays.

### Claim 12 (depends on 2)

The sample carrier of claim 2 in which the metal foil has a thickness of at least 20 μm and the part with a reduced thickness has a thickness of at most 10 μm.

### Claim 13 (depends on 3)

The sample carrier of claim 3 in which the tapering part shows a taper angle with respect to the flat of the sample carrier of less than 45 degrees, more specifically less than 30 degrees, most specifically less than 20 degrees.

### Claim 14 (depends on 4)

The sample carrier of claim 4 in which the tapering part shows a taper angle with respect to the flat of the sample carrier of less than 45 degrees, more specifically less than 30 degrees, most specifically less than 20 degrees.

### Claim 15 (depends on 3)

The sample carrier of claim 3 in which the tapering part is formed by laser ablation of the metal.

### Claim 16 (depends on 4)

The sample carrier of claim 4 in which the tapering part is formed by laser ablation of the metal.

### Claim 17 (depends on 5)

The sample carrier of claim 5 in which the tapering part is formed by laser ablation of the metal.

### Claim 18 (depends on 2)

The sample carrier of claim 2 in which the sample carrier has a uniform consistency.

### Claim 19 (depends on 2)

The sample carrier of claim 2 in which the sample carrier comprises a carbon foil extending beyond the boundaries of the metal foil.

### Claim 20 (depends on 10)

The method of claim 10 in which inspection with an electron beam comprises detecting transmitted electrons and/or detecting X-rays.