# US 2014/0197310 A1 · Method of analyzing a sample and charged particle beam device for analyzing a sample > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2014/0197310 A1 - Document ID: US20140197310A1 - Status: Published application - Kind: A1 - Application number: 14/150,012 - Filed: 2014-01-08 - Published: 2014-07-17 - Earliest claimed: 2013-01-15 - Assignees: Carl Zeiss Microscopy GmbH - Applicants: Carl Zeiss Microscopy Ltd. - Inventors: Edward Hill; Stewart Bean - Web page: https://patentgrep.com/patent/US20140197310A1 ## CPC - H01J 37/26: Electron or ion microscopes; Electron or ion diffraction tubes - G01N 23/2254: Measuring cathodoluminescence - H01J 2237/2804: Scattered primary beam - H01J 2237/2806: Secondary charged particle - H01J 2237/2808: Cathodoluminescence - H01J 2237/2809: characterised by the imaging problems involved - H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H) - G01N: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES (measuring or testing apparatus or processes other than immunoassay, involving enzymes or microorganisms C12M, C12Q) ## Abstract The invention refers to a method and a charged particle beam device for analyzing an object using a charged particle beam interacting with the object. The object comprises a sample embedded in a resin. Interaction radiation in the form of cathodoluminescence light is detected for identifying areas in which the resin is arranged and in which the sample is arranged. Interaction particles are detected to identify particles within the resin and the sample for further analysis by using EDX analysis. ## Claims ### Claim at position 1 -8. (canceled) ### Claim 9 A method of analyzing an object using a charged particle beam device, the charged particle beam device comprising a charged particle source to generate a charged particle beam, an objective lens to focus the charged particle beam onto the object, a first detector to detect interaction radiation and a second detector to detect interaction particles, the object comprising a sample and a resin, the method comprising: generating the charged particle beam using the charged particle source; using the objective lens to guide the charged particle beam onto the sample and the resin; guiding the charged particle beam over the sample and the resin; generating interaction radiation emitted from the sample and the resin due to interaction of the charged particle beam with the sample and the resin; detecting the interaction radiation using the first detector to identify a first area in which the resin is arranged and to identify a second area in which the sample is arranged; identifying a position of at least one particle of the resin in the first area or at least one particle of the sample in the second area by detecting interaction particles using the second detector, the interaction particles being generated by the interaction of the charged particle beam with the at least one particle of the resin or of the at least one particle of the sample; and using the charged particle beam to analyze the at least one particle of the resin or of the at least one particle of the sample. ### Claim 10 (depends on 9) The method of claim 9, wherein the interaction radiation comprises cathodoluminescence light. ### Claim 11 (depends on 9) The method of claim 9, wherein analyzing the at least one particle of the resin or the at least one particle of sample comprises detecting the interaction particles using the second detector. ### Claim 12 (depends on 11) The method of claim 11, wherein the interaction particles comprise particles emitted by the sample or particles backscattered from the sample. ### Claim 13 (depends on 9) The method of one of claim 9, wherein analyzing the at least one particle of the resin or of the at least one particle of the sample comprises detecting electromagnetic radiation emitted by the at least one particle of the resin or of the at least one particle of the sample, the electromagnetic radiation being generated by the interaction of the charged particle beam with the at least one particle of the resin or of the at least one particle of the sample. ### Claim 14 (depends on 13) The method of claim 13, wherein the electromagnetic radiation comprises X-rays. ### Claim 15 (depends on 9) The method of claim 9, wherein the charged particle beam comprises an electron beam. ### Claim 16 (depends on 9) The method of claim 9, wherein: the charged particle beam comprises an electron beam; the interaction radiation comprises cathodoluminescence light; and analyzing the portion of the resin or the portion of the sample comprises detecting the interaction particles using the second detector. ### Claim 17 (depends on 9) The method of claim 9, wherein: the charged particle beam comprises an electron beam; the interaction radiation comprises cathodoluminescence light; and analyzing the at least one particle of the resin or of the at least one particle of the sample comprises detecting electromagnetic radiation emitted by the at least one particle of the resin or of the at least one particle of the sample. ### Claim 18 A method of analyzing an object which comprises a sample and a resin, the method comprising: detecting interaction radiation emitted by the object to identify a first region of the object which comprises the resin and a second region of the object which comprises the sample, the interaction radiation being generated by scanning a charged particle beam over the object; detecting interaction particles to identify a position of a portion of the sample or a portion of the resin, the interaction particles being generated by the interaction of the charged particle beam with the portion of the sample or the portion of the resin; and using the charged particle beam to analyze the portion of the resin or of the portion of the sample. ### Claim 19 (depends on 18) The method of claim 18, wherein the interaction radiation is detected with a first detector, and the interaction particles are detected with a second detector. ### Claim 20 (depends on 19) The method of claim 19, wherein analyzing the portion of the resin or the portion of the sample comprises detecting the interaction particles with the second detector. ### Claim 21 (depends on 20) The method of claim 20, wherein the interaction particles comprise particle emitted by the sample or particles backscattered from the sample. ### Claim 22 (depends on 18) The method of claim 18, wherein analyzing the portion of the resin or the portion of the sample comprises detecting electromagnetic radiation emitted by the portion of the resin or of the portion of the sample, the electromagnetic radiation being generated by the interaction of the charged particle beam with the portion of the resin or of the portion of the sample. ### Claim 23 (depends on 18) The method of claim 18, wherein the charged particle beam comprises an electron beam or an ion beam. ### Claim 24 (depends on 18) The method of claim 18, wherein the interaction radiation comprises cathodoluminescence light. ### Claim 25 (depends on 18) The method of claim 18, wherein: the charged particle beam comprises an electron beam; the interaction radiation comprises cathodoluminescence light; and analyzing the portion of the resin or the portion of the sample comprises detecting the interaction particles. ### Claim 26 (depends on 18) The method of claim 18, wherein: the charged particle beam comprises an electron beam; the interaction radiation comprises cathodoluminescence light; and analyzing the portion of the resin or the portion of the sample comprises detecting electromagnetic radiation emitted by the portion of the resin or of the portion of the sample. ### Claim 27 (depends on 9) A computer program product tangibly embodied in a computer readable medium comprising instructions configured to cause a computing device to analyze an object using a charged particle beam device, wherein the instructions are configured to cause the computing device to execute the method according to claim 9. ### Claim 28 (depends on 27) A device, comprising: a charged particle source configured to generate a charged particle beam; an objective lens configured to focus the charged particle beam onto an object; a first detector configured to detect interaction radiation; a second detector configured to detect interaction particles; a microprocessor; and a computer readable medium according to claim 27.